Bonded Optical Unit Layout for Large-Area Laser Crystallization
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Solution Overview
Problem
Existing laser crystallization apparatuses face challenges in efficiently irradiating laser beams over large areas without increasing manufacturing costs, particularly as glass substrates for display devices become larger.
Innovation Solution
The apparatus employs a configuration of sub-optical units with bonded surfaces that are offset from each other, allowing for the formation of large-sized optical units through optical contact bonding or welding, ensuring uniform laser beam intensity distribution across the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a single large optical unit is used to irradiate laser beams over large areas, then the coverage area is improved, but the manufacturing cost increases
Solution Approach 1:
The optical unit is divided into multiple sub-optical units (first sub-optical unit, second sub-optical unit, etc.) that are arranged in sequence along the incident direction of the laser beam. Each sub-optical unit processes a portion of the laser beam, and their combined effect achieves large-area irradiation without requiring a single large optical component, thereby reducing manufacturing cost while maintaining coverage area.
2Ease of manufacture
If multiple sub-optical units are arranged in sequence, then the manufacturing cost is reduced, but the uniformity of laser beam intensity may be affected
Solution Approach 1:
Each sub-optical unit is designed with specific local characteristics to compensate for potential intensity variations. The bonded surfaces are offset from each other to create different optical paths, and each sub-optical unit is optimized to contribute appropriately to the overall uniform intensity distribution across the irradiation area.
Solution Approach 2:
The offset arrangement of bonded surfaces creates inherent optical path differences that can be designed to compensate for intensity variations. By carefully positioning the bonded surfaces at different locations, the system achieves self-balancing of laser beam intensity across the multiple sub-optical units.
3Manufacturing precision
If bonded surfaces are offset from each other, then the uniformity of laser beam intensity is maintained, but the optical system complexity increases
Solution Approach 1:
The bonded surfaces of adjacent sub-optical units are intentionally offset from each other, creating an asymmetric arrangement. This asymmetry is designed to produce different optical paths that compensate for intensity variations, achieving uniform laser beam intensity distribution across the irradiation area without requiring complex additional components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables efficient irradiation of laser beams over large areas without increasing manufacturing costs, maintaining uniformity and scalability of the laser beam intensity.
Implementation Method 1
it is the object to prevent heterogeneity in energy caused by an optical interference produced in the linear laser beam
Implementation Method 2
The divided laser beams are converged on an irradiate surface by the action of a cylindrical lens array and a cylindrical lens
Implementation Method 3
an annealing method using a laser has been disclosed
Implementation Method 4
If the silicon film is annealed by the linear laser beam while the linear laser beam is being shifted in the width direction of the linear laser beam, the silicon film is remarkably homogenized
Data Source
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AI summary
A laser crystallization apparatus according to an embodiment includes a light source unit configured to irradiate a laser beam; and an optical unit to which the laser beam is incident, in use, wherein the optical unit includes a first portion and a second portion bonded to each other to form a bonded surface, and a first width of the first portion and a second width of the second portion are the same as each other at the bonded surface based on a direction parallel to the incident direction of the laser beam.