Boom Drive Apparatus for Multi-Arm Robot Substrate Transport
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Solution Overview
Problem
Conventional electronic device manufacturing systems face challenges in efficiently and precisely transporting substrates between multiple process chambers and load lock chambers, requiring improved rigidity and assembly for multi-arm robots to manage high mass and facilitate precise pick and place operations.
Innovation Solution
A boom drive apparatus is introduced, featuring a hub with radially extending web, driving members, and transmission members to rotate and position multi-arm robots at outboard ends, providing the necessary rigidity and ease of assembly for efficient substrate transport between twin chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multi-arm robots are used to transport substrates between multiple chambers, then substrate transport efficiency is improved, but the mass and complexity of the robot system increases
Solution Approach 1:
The robot system is divided into multiple independent multi-arm robots, each responsible for transporting substrates to specific chambers. This segmentation allows each robot to be optimized independently for its specific transport route, reducing the overall mass compared to a single heavy-duty robot attempting to service all chambers.
Solution Approach 2:
Each multi-arm robot is designed with universal capabilities to transport substrates between multiple chambers and load lock chambers. The robots can perform multiple functions (transport to different locations, handle different substrate types) within a single device, improving productivity without requiring separate specialized systems.
2Manufacturing precision
If conventional robot structures are used, then assembly simplicity is maintained, but structural rigidity is insufficient for precise pick and place operations
Solution Approach 1:
The robot arms are pre-assembled with integrated drive mechanisms and end effectors in a modular configuration before being installed in the chamber. This preliminary assembly ensures precise mechanical alignment and rigidity are built-in during manufacturing, while the modular nature maintains ease of assembly during system integration.
Solution Approach 2:
Traditional purely mechanical linkages are replaced with hybrid systems incorporating precision motors, ball screws, and feedback sensors in the robot arms. This substitution provides the necessary rigidity and precision for pick and place operations while the standardized interfaces maintain assembly simplicity.
3Productivity
If single-arm robots are used, then device complexity is reduced, but throughput capability is limited
Solution Approach 1:
Multiple arms are combined into a single integrated multi-arm robot system that shares common drive mechanisms, control systems, and structural support. This merging approach enables parallel transport operations to multiple chambers, significantly improving throughput capability while avoiding the excessive complexity of having completely independent single-arm systems for each chamber.
Data Source
AI summary
Boom drive apparatus for substrate transport systems and methods are described. The boom drive apparatus is adapted to drive one or more multi-arm robots rotationally mounted to the boom to efficiently put or pick substrates. The boom drive apparatus has a boom including a hub, a web, a first pilot above the web, and a second pilot below the web, a first driving member rotationally mounted to the first pilot, a second driving member rotationally mounted to the second pilot, a first driven member rotationally mounted to the boom above the a web, a second driven member rotationally mounted to the boom below the a web, and a first and second transmission members coupling the driving members to driven members located outboard on the boom. Numerous other aspects are provided.