Broadband Ion Beam Transmission via Inverted Magnetic Fields
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Solution Overview
Problem
The existing methods for transmitting broadband ion beams in ion implanters result in a non-identical distribution of the emergence ion beam compared to the incident beam and low transmission efficiency due to the lack of focusing in the vertical direction.
Innovation Solution
The method involves using two independent magnetic fields, an analyzing magnetic field and a calibration magnetic field, where the analyzing magnetic field focuses the ion beam in the horizontal direction and the calibration magnetic field adjusts the angle to achieve identical angular distribution, with the analyzing magnetic field deflecting the ion beam anticlockwise and the calibration magnetic field deflecting it clockwise in the horizontal direction, and both fields having uneven components to enhance focusing and transmission efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the analyzing magnetic field and the calibration magnetic field are used to analyze and calibrate the ion beam, then the mass analysis and angle calibration are achieved, but the distribution of the emergence ion beam is not identical with that of the incident ion beam
Solution Approach 1:
The patent introduces a reverse magnetic field that deflects the ion beam in the opposite direction to the analyzing magnetic field. This reverse deflection compensates for the distribution changes caused by the analyzing and calibration fields, restoring the emergence ion beam distribution to match the incident beam distribution.
2Manufacturing precision
If the analyzing magnetic field and the calibration magnetic field focus the ion beam only in the horizontal direction, then the horizontal focusing is achieved, but the transmission efficiency of the broadband ion beam is low
Solution Approach 1:
The patent extends the focusing from one dimension (horizontal) to two dimensions by introducing vertical focusing components. The analyzing and calibration magnetic fields are configured to provide both horizontal and vertical focusing, thereby increasing the transmission efficiency of the broadband ion beam while maintaining horizontal focusing precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach ensures that the distribution of the emergence ion beam matches the original incident beam and significantly increases the transmission efficiency by focusing the ion beam in both horizontal and vertical directions, improving the overall focusing and implantation process.
Implementation Method 1
an analyzing magnetic field analyzes the mass of a broadband ion beam emitted into the analyzing magnetic field from an incident face thereof
Implementation Method 2
the analyzing magnetic field enables the broadband ion beam emitted into the analyzing magnetic field from the incident face thereof to be deflected anticlockwise in the horizontal direction
Implementation Method 3
an analyzing grating disposed at the focal spot selectively enables the required ions to pass therethrough
Implementation Method 4
a calibration magnetic field calibrates the angle of the ion beam which diffuses again after passing through the analyzing grating and is then emitted into the calibration magnetic field from the incident face thereof
Implementation Method 5
the calibration magnetic field enables the ion beam diffusing again after passing through the analyzing grating to be deflected clockwise in the horizontal direction
Data Source
AI summary
A method for transmitting a broadband ion beam (100) and an ion implanter adopt an analyzing magnetic field (1), a calibration magnetic field (2) and an analyzing grating (6) to transmit a broadband ion beam. If the analyzing magnetic field (1) enables the broadband ion beam (100) emitted into the analyzing magnetic field from an incident face (101) thereof to be deflected anticlockwise in a horizontal direction, the calibration magnetic field (2) enables an ion beam diffusing again after passing through the analyzing grating (6) to be deflected clockwise in the horizontal direction; if the analyzing magnetic field (1) enables the broadband ion beam (100) emitted into the analyzing magnetic field from the incident face (101) thereof to be deflected clockwise in the horizontal direction, the calibration magnetic field (2) enables an ion beam diffusing again after passing through the analyzing grating (6) to be deflected anticlockwise in the horizontal direction. The analyzing magnetic field (1) and the calibration magnetic field (2) enable the ion beam to be deflected along different directions in the horizontal direction, so that distribution of the required ions in the broadband ion beam (100) when emitted out of the calibration magnetic field (2) from an emergence face (202) thereof is the same as the distribution when being emitted into the analyzing magnetic field.