Bubble Damper for Slurry Supply Apparatus
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Solution Overview
Problem
The generation of bubbles in slurry during the CMP process disrupts the compounding ratio, leading to inaccurate sensor detection and unstable slurry supply, as existing systems fail to effectively collect or suppress bubbles in the slurry supply apparatus.
Innovation Solution
A bubble damper system is introduced, utilizing a vacuum pump or booster pump to collect bubbles generated in the slurry supply apparatus, ensuring stable slurry supply by positioning a bubble damper between the slurry drum and the vessel, and employing sensors and filters to manage pressure and particle distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If slurry is supplied through pipelines and pumps, then slurry can be delivered to the vessel, but bubbles are generated due to vortexes and friction
Solution Approach 1:
A bubble damper is introduced as an intermediary component between the slurry drum and the vessel. The damper receives slurry from the drum, allows bubbles to rise and escape through a separate path, and then supplies bubble-free slurry to the vessel. This mediator separates the slurry supply function from the bubble removal function, solving the contradiction by adding a dedicated bubble management component.
2Duration of action of moving object
If bubbles are present in slurry, then slurry can flow continuously, but sensor detection accuracy deteriorates due to inappropriate compounding ratio
Solution Approach 1:
The bubble damper extracts bubbles from the slurry stream by providing a separate path for gas to escape. The slurry flows continuously through the damper, while bubbles are removed through a dedicated bubble exit path. This separation allows continuous slurry supply to be maintained while simultaneously improving sensor detection accuracy by eliminating bubbles that would interfere with measurements.
3Object-generated harmful factors
If vacuum pump or booster pump is used to collect bubbles, then bubble collection efficiency is improved, but device complexity increases
Solution Approach 1:
The bubble damper is designed to operate passively using the natural buoyancy of bubbles and the flow dynamics of slurry. Bubbles automatically rise to the top of the damper and escape through the bubble exit path without requiring external vacuum pumps or booster pumps. The slurry flow itself drives the bubble separation process, making the system self-sufficient and avoiding additional complex components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The bubble damper system effectively reduces bubbles in the slurry supplied to the vessel, maintaining a uniform compounding ratio and preventing malfunctions in slurry detection, thereby stabilizing the CMP process and ensuring consistent slurry supply.
Implementation Method 1
a bubble damper system that includes a bubble damper and efficiently collects bubbles by a vacuum pump or booster pump
Implementation Method 2
The bubble damper collects bubbles generated from the slurry that is supplied from the slurry drum
Data Source
AI summary
Provided is a bubble damper of a slurry supply apparatus, more particularly, a bubble damper of a slurry supply apparatus in which a bubble damper removes bubbles generated by a slurry supply apparatus. The bubble damper system includes a slurry drum in which slurry is stored, a vessel to which the slurry is supplied from the slurry drum, and a bubble damper that is provided between the slurry drum and the vessel. The bubble damper collects bubbles generated from the slurry that is supplied from the slurry drum.