Bubble Measurement Cover for Distortion-Free Liquid Inspection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The challenge is to accurately measure bubbles in a liquid flowing through components of a liquid supply apparatus, particularly when these components have curved cross-sections, which causes light refraction and distortion, making it difficult to detect small bubbles.
Innovation Solution
A bubble measurement unit is introduced, which includes a cover made of a light-transmitting material installed on the component, providing an inspection area. This unit minimizes light refraction by filling the space between the cover and the component with a material having the same refractive index as the component, allowing for accurate bubble detection regardless of the component's cross-sectional shape.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If light is applied toward a component with a curved cross-section to detect bubbles, then bubble detection is attempted, but light refraction and reflection at the boundary cause image distortion making accurate measurement difficult
Solution Approach 1:
A cover made of light-transmitting material is introduced as an intermediary component. The cover has a flat first surface that interfaces with the liquid containing bubbles, and a second surface that interfaces with the inspection camera. This intermediary flat surface eliminates the curved boundary that causes refraction and reflection, allowing light to pass through without distortion while still enabling bubble detection in the curved cross-section component
Solution Approach 2:
The cover is designed with different surface properties: the first surface is flat to eliminate refraction for light entering from the liquid side, while the second surface can be curved or flat depending on the specific application requirements. This local differentiation of surface quality allows the system to maintain both optical clarity and compatibility with curved components
2Measurement precision
If a cover made of light-transmitting material is installed on a component with curved cross-section, then light refraction is minimized, but the device complexity increases
Solution Approach 1:
The cover serves multiple functions simultaneously: it acts as a refractive index matching interface to eliminate light refraction, provides a flat viewing surface for the inspection camera, protects the liquid flow path, and can be designed to fit various component geometries. This multi-functionality reduces the need for additional separate components, thereby limiting the increase in device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables precise measurement of bubble sizes and numbers in the liquid supply apparatus, even with components having curved cross-sections, thereby improving substrate treatment processes by reducing yield loss due to bubble-related issues.
Implementation Method 1
When the component has a curved cross-section, light applied toward the boundary of the component may be reflected or refracted. Due to the reflection or refraction of the light, the shapes of the bubbles flowing in the component may be distorted.
Implementation Method 2
When the component has a curved cross-section, light applied toward the boundary of the component may be reflected or refracted.
Implementation Method 3
the space may be filled with a material having the same refractive index as a material of the component provided in the inspection area
Data Source
AI summary
The inventive concept relates to an apparatus for treating a substrate. The apparatus includes a liquid supply unit that supplies a liquid to a substrate, a cover that is formed of a light transmitting material and installed on a component provided in the liquid supply unit and that provides an inspection area, and an inspection unit that inspects bubbles contained in the liquid flowing in the component provided in the inspection area. The inspection unit includes a light source that applies light toward the inspection area from outside the cover, a light receiving part that is located outside the cover and that receives the light passing through the inspection area, and an inspection part that inspects the bubbles from the light received by the light receiving part.