Multi-Line Buffer Unit for Substrate Cleaning Pressure Control
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Solution Overview
Problem
Existing substrate cleaning systems are limited in their ability to efficiently adjust pressure in buffer units for effective cleaning, as they typically operate in only one mode (positive or negative pressure), which hampers cleaning efficiency and versatility across different processes.
Innovation Solution
An apparatus and method that includes a buffer unit with a housing, substrate support, and a pressure adjustment unit featuring multiple gas supply and exhaust lines, controlled by a controller to maintain either a filling mode or an exhaust mode, allowing for adjustable pressure settings based on the specific cleaning process requirements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a buffer unit uses only one gas supply line or one gas exhaust line, then the device complexity is reduced, but the adaptability for different cleaning modes (positive/negative pressure) deteriorates
Solution Approach 1:
The buffer unit is designed with multiple gas supply lines and multiple gas exhaust lines that can be selectively activated based on the required cleaning mode. This multi-functionality allows a single buffer unit to perform both positive pressure cleaning (using first gas supply line and first gas exhaust line) and negative pressure cleaning (using second gas supply line and second gas exhaust line), eliminating the need for separate buffer units for each mode while maintaining adaptability.
2Adaptability or versatility
If a buffer unit is designed to support multiple cleaning modes with multiple gas lines, then the adaptability for different processes is improved, but the device complexity increases
Solution Approach 1:
The system employs dynamic configuration where the controller selectively activates specific gas supply lines and gas exhaust lines based on the required cleaning mode. Rather than having all lines permanently connected and active, the system dynamically configures the gas flow paths by controlling valves or switches, allowing multiple cleaning modes to be achieved with a manageable number of physical lines while reducing unnecessary complexity.
3Productivity
If the number of gas supply lines and gas exhaust lines is increased, then the cleaning efficiency for various processes is improved, but the ease of operation deteriorates
Solution Approach 1:
The controller automatically selects and activates the appropriate gas supply lines and gas exhaust lines based on the selected cleaning mode, eliminating the need for manual configuration by the operator. The system provides feedback control where the controller monitors the operating mode and automatically adjusts the gas line configuration, maintaining high cleaning efficiency while preserving ease of operation through automated control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances cleaning efficiency by allowing for varied pressure adjustments, improving the removal of residues and drying of substrates, and preventing contamination, thereby optimizing the cleaning process for different substrate treatments.
Implementation Method 1
a gas supply line that supplies a gas into the buffer space to pressurize the buffer space
Implementation Method 2
a gas exhaust line that reduces the pressure in the buffer space by removing the gas from the buffer space
Data Source
AI summary
Embodiments of the inventive concept provide an apparatus and method for storing a substrate. A buffer unit for storing a substrate includes a housing having an entrance formed at one side and a buffer space inside, a substrate support unit that supports one or more substrates in the buffer space, a pressure adjustment unit that adjusts pressure in the buffer space, and a controller that controls the pressure adjustment unit. The pressure adjustment unit includes a gas supply line that supplies a gas for pressurizing the buffer space and a gas exhaust line that reduces the pressure in the buffer space. At least one of the gas supply line and the gas exhaust line includes a plurality of lines.