Conductive Atomic Force Microscope Probe Calibration

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Solution Overview

Problem

Conductive atomic force microscopes face challenges in ensuring reliable and reproducible measurements due to variations in contact resistance between probes and measurement objects, especially when different probes are used.

Innovation Solution

A conductive atomic force microscope system that includes multiple probe structures, a power supply unit, a current detecting unit, and a control unit to calculate representative currents and scaling factors, allowing for uniform current measurement and reproducible results by adjusting for differences in probe resistance and bias voltage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple different probes are used for measurement, then measurement versatility is improved, but measurement precision deteriorates due to contact resistance variations

Engineering Contradiction:

Improvemeasurement versatilityVSAvoidmeasurement precision

Core Design Contradiction:

Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The system changes the electrical parameters (contact resistance, bias voltage) of different probes and applies compensation algorithms to normalize the measurements. By detecting and calculating compensation values based on representative currents from multiple probes, the system adjusts measurement parameters to achieve consistent results across different probe types.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The system implements a feedback mechanism where representative currents are measured from multiple probes, compensation values are calculated based on these measurements, and the compensation values are applied to normalize subsequent measurements. This closed-loop approach ensures that variations in probe characteristics are continuously compensated for, maintaining measurement precision across different probes.

Inventive Principle:

Principle #23Feedback

2Device complexity

If contact resistance is not compensated, then device complexity is reduced, but reliability of measurements deteriorates

Engineering Contradiction:

Improvedevice complexityVSAvoidreliability of measurements

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

The system performs self-calibration by automatically measuring representative currents from multiple probes, calculating compensation values, and applying these corrections without requiring external intervention. The microscope system itself generates and applies the compensation factors, making the reliability improvement self-contained and not requiring additional complex external calibration equipment.

Inventive Principle:

Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system enables reliable and reproducible current measurements by normalizing currents measured by different probes, reducing the impact of probe variations and ensuring consistent results across various probe types and states.

Implementation Method 1

a power supply unit configured to apply a bias voltage to each of a sample object and a measurement object

Methodology Applied

Scientific EffectBias voltage application: Electric Field

Implementation Method 2

measuring a current flowing between a probe and the measurement object

Methodology Applied

Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 3

The resistance and conductance distribution of the measurement object may be measured by measuring a current flowing through the probe

Methodology Applied

Scientific EffectElectrical resistance: Electrical Resistance

Data Source

PatentUS9261532B1Conductive atomic force microscope and method of operating the same

Publication Date: 2016.02.16 SAMSUNG ELECTRONICS CO LTD

AI summary

A conductive atomic force microscope including a plurality of probe structures each including a probe and a cantilever connected thereto, a power supplier applying a bias voltage, a current detector detecting a first current flowing between a sample object and each of the probes and a second current flowing between a measurement object and each of the probes, and calculating representative currents for the sample and measurement objects based on the first and second currents, respectively, and a controller calculating a ratio between representative currents of the sample object measured by each of the probe structures, calculating a scaling factor for scaling the representative current with respect to the measurement object measured by each of the probes, and determine a reproducible current measurement value based on the second measurement current and the scaling factor may be provided.