Cam Actuated Filament Clamp for Ion Source

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Solution Overview

Problem

Conventional ion source filament clamps in ion implantation systems face challenges due to high temperatures, leading to thread galling and stress relaxation, resulting in compromised electrical connections and increased maintenance costs.

Innovation Solution

A robust filament clamp design featuring a cam surface and follower mechanism, with an actuator pin and cam member that allows for secure clamping and easy release of the filament leads, utilizing a heat-treated metal with a predetermined spring constant for reliable operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If conventional screws are used to clamp filament leads, then the clamp can be tightened to secure the leads, but the high temperatures cause thread galling and stress relaxation, compromising the electrical connection

Engineering Contradiction:
Improveclamping forceVSAvoidelectrical connection reliability
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The patent replaces the conventional screw-threaded mechanical fastening system with a cam-actuated clamping mechanism. The cam surface and follower convert rotational motion into linear clamping motion, eliminating threaded connections that are susceptible to galling and stress relaxation at high temperatures. This substitution maintains clamping force while improving reliability in the ion source environment.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the operational parameters of the clamping mechanism by using a cam profile designed to provide consistent clamping force through its geometry. The cam surface angle and follower position are optimized to maintain adequate clamping pressure on the filament leads without relying on threaded fasteners that degrade under thermal stress.

Inventive Principle:
Principle #35Parameter changes

2Ease of operation

If screws are used to tighten the filament clamp, then the leads can be securely held, but the high temperatures make threading difficult and cause galling, increasing maintenance needs

Engineering Contradiction:
Improveclamping operationVSAvoidmaintenance difficulty
Core Design Contradiction:
Ease of operationVSEase of repair

Solution Approach 1:

The cam-actuated mechanism replaces screw threading operations with a simple rotational cam movement. The cam surface guides the follower to automatically generate the clamping action, eliminating the need for threading operations that are difficult to perform at high temperatures and prone to galling.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The cam mechanism is designed to be self-actuating, where rotation of the cam automatically generates the clamping force through its geometric profile. The follower rides along the cam surface, which inherently provides the clamping motion without requiring additional threading or fastening operations.

Inventive Principle:
Principle #25Self-service

3Reliability

If conventional clamps are used in high temperature ion sources, then the filament leads can be clamped, but stress relaxation occurs, worsening the clamping ability and requiring repair or replacement

Engineering Contradiction:
Improveclamping abilityVSAvoidclamp service life
Core Design Contradiction:
ReliabilityVSDuration of action of stationary object

Solution Approach 1:

The patent replaces stress-prone threaded screw connections with a cam-actuated system where clamping force is generated by the geometric profile of the cam surface. This eliminates cold-formed screws that undergo stress relaxation at high temperatures, thereby extending the service life of the clamping mechanism in the ion source environment.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides consistent and secure clamping of filament leads, reducing maintenance needs and downtime by preventing thread galling and stress issues, ensuring efficient operation of the ion source.

Implementation Method 1

a cam member operably coupled to the second section of the actuator pin, wherein the cam member comprises a handle and one of a cam surface and a cam follower... The cam follower is configured to slidingly contact the cam surface

Methodology Applied
Scientific EffectCam mechanism: Cam

Implementation Method 2

utilizing a heat-treated metal with a predetermined spring constant for reliable operation... One of the first predetermined manner and second predetermined manner comprises inducing a spring tension between the first and second portions of the clamp member

Methodology Applied
Scientific EffectElasticity: Elasticity

Data Source

PatentUS9502207B1Cam actuated filament clamp
Publication Date: 2016.11.22 AXCELIS TECHNOLOGIES INC
  • US9502207B1 patent drawing
  • US9502207B1 patent drawing
  • US9502207B1 patent drawing

AI summary

An ion source filament clamp has a clamp member having first and second ends. The first end has one of a cam surface and a cam follower, and has first and second portions that are opposed to one another and separated by a slot having a lead opening defined therein to receive a lead of an ion source filament. An actuator pin extends along an actuator pin axis and has first and second sections. The first section is coupled to the first portion of the clamp member. The actuator pin extends through, and is in sliding engagement with, a thru-hole in the second portion of the clamp member. A cam member is operably coupled to the second section of the actuator pin. The cam member has a handle and the other of the cam surface and cam follower and is configured to rotate between a clamped position and an unclamped position. The cam follower slidingly contacts the cam surface. In the clamped position, the cam follower engages the cam surface in a first predetermined manner, thus selectively compressing the first and second portions of the clamp member toward one another and exerting a clamping pressure on the lead within the lead opening while inducing a spring tension between the first and second portions of the clamp member. In the unclamped position, the cam follower engages the cam surface in a second predetermined manner, wherein the spring tension extends the first and second portions of the clamp member apart from one another, therein releasing the clamping pressure on the lead within the lead opening.