Automated Camera System for Robot Teach-In Positioning Accuracy

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Solution Overview

Problem

The existing methods for teaching or controlling robots that move wafers or masks in semiconductor processing are inefficient, often requiring manual visual control, leading to potential damage, increased particle generation, and system contamination, resulting in downtime and reduced yield due to inaccurate positioning.

Innovation Solution

A method utilizing cameras to recognize and monitor the movement of robots and substrates, allowing for automated or partially automated teach-in processes by recording and adjusting movement curves, eliminating the need for visual control and minimizing system opening, thereby reducing contamination and downtime.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If manual visual control is used for teach-in, then the robot can be taught movement curves, but the process is time-consuming and requires system opening causing downtime

Engineering Contradiction:

Improvepositioning accuracyVSAvoiddowntime

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The patent replaces manual visual monitoring with an automated optical camera system that records and evaluates robot movements. The camera captures images during robot teach-in, and software automatically analyzes whether the robot reached target positions, eliminating the need for operators to visually monitor movements and reducing teach-in time significantly.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system performs self-evaluation of teach-in accuracy through automated image recognition. The camera system and evaluation software enable the robot system to automatically verify its own positioning accuracy without external human intervention, allowing teach-in to proceed faster and reducing downtime.

Inventive Principle:

Principle #25Self-service

2Ease of operation

If manual visual monitoring is used during teach-in, then movement can be controlled, but operator view is limited especially in vacuum chambers

Engineering Contradiction:

Improvemonitoring capabilityVSAvoidteach-in accuracy

Core Design Contradiction:

Ease of operationVSReliability

Solution Approach 1:

The patent replaces human visual monitoring with an automated camera-based optical system that provides comprehensive views of robot movements. The camera system captures images from multiple angles and the software automatically evaluates positioning accuracy, eliminating limitations of human vision especially in vacuum chamber environments where operator access is restricted.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If frequent teach-in is performed to maintain accuracy, then positioning precision is improved, but system opening causes contamination

Engineering Contradiction:

Improvepositioning accuracyVSAvoidcontamination

Core Design Contradiction:

Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent implements automated optical evaluation that can quickly assess teach-in accuracy without requiring system opening. The camera system captures images and software evaluates positioning, enabling rapid verification that minimizes the time the vacuum chamber needs to be opened, thereby reducing contamination risk.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system performs preliminary automated evaluation of teach-in accuracy immediately after robot movements are taught, using camera images captured during the process. This allows quick verification without prolonged system opening, and enables proactive identification of positioning issues before they affect production.

Inventive Principle:

Principle #10Preliminary action

4Reliability

If two operators are used for visual monitoring, then collision avoidance is improved, but operational complexity increases

Engineering Contradiction:

Improvecollision avoidanceVSAvoidoperational complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent replaces human operators with an automated camera system that continuously monitors robot movements and evaluates positioning accuracy. The camera captures images from multiple angles and software automatically detects potential collisions or positioning errors, eliminating the need for multiple operators and simplifying the operational complexity while maintaining or improving safety.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables precise and efficient teaching and control of robots, reducing the risk of damage and contamination, allowing for fully or partially automated teach-in processes, and maintaining system cleanliness, thus improving yield and operational efficiency.

Implementation Method 1

at least one camera is used, which records the movement of the robot and/or the wafer or the mask

Methodology Applied

Scientific EffectImage capture: Photography

Data Source

PatentEP3648152A1Method of teaching or controlling a robot and system used therefor

Publication Date: 2020.05.06 INTEGRATED DYNAMICS ENG

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AI summary

A method for teaching or controlling a robot to move a wafer or mask, wherein at least one camera is used to record the movement of the robot, wafer, or mask. The method is particularly useful for teaching in a robot with an end effector for transporting a wafer or mask.