Microfabricated Cantilever Chip for In-Situ TEM Nanomanipulation

Solution Overview

Problem

Current instrumentation for micro and nano-sized objects lacks the capability to perform in-situ measurement and manipulation within a transmission electron microscope (TEM), leading to sample alteration or destruction during transfer between instruments, limiting the ability to measure physical properties while imaging.

Innovation Solution

A microfabricated cantilever chip system with a sample holder and gripper structure, designed for in-situ use in TEMs, featuring piezo-resistive arms and electrical connectors for mechanical and electrical testing, allowing for precise manipulation and measurement of nano-sized objects without removing them from the TEM.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple stand-alone instruments are used for different measurements, then measurement capabilities are improved, but sample integrity and operational complexity deteriorate due to repeated sample transfer

Engineering Contradiction:

Improvemeasurement capabilitiesVSAvoidsample integrity

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The patent combines multiple measurement and manipulation functions (TEM imaging, AFM surface analysis, STM electrical measurements, and mechanical testing) into a single integrated instrument platform. This allows all measurements to be performed on the same sample without transfer, eliminating the risk of sample alteration while maintaining comprehensive measurement capabilities.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The instrument is designed with universal functionality to perform diverse measurements including topographic imaging, electrical property measurement, and mechanical property measurement using a common sample holder and measurement stage, eliminating the need for multiple specialized instruments.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Adaptability or versatility

If multiple stand-alone instruments are used for different measurements, then measurement capabilities are improved, but device complexity and time consumption increase due to sample transfer between instruments

Engineering Contradiction:

Improvemeasurement capabilitiesVSAvoidtime consumption

Core Design Contradiction:

Adaptability or versatilityVSLoss of time

Solution Approach 1:

The patent combines multiple measurement and manipulation functions (TEM imaging, AFM surface analysis, STM electrical measurements, and mechanical testing) into a single integrated instrument platform. This allows all measurements to be performed on the same sample without transfer, eliminating the risk of sample alteration while maintaining comprehensive measurement capabilities.

Inventive Principle:

Principle #5Merging (Combining)

3Ease of operation

If standard TEM sample holders are used, then ease of operation is improved, but measurement capability deteriorates due to lack of integrated manipulation functions

Engineering Contradiction:

Improveease of useVSAvoidmeasurement capability

Core Design Contradiction:

Ease of operationVSAdaptability or versatility

Solution Approach 1:

The patent combines multiple measurement and manipulation functions (TEM imaging, AFM surface analysis, STM electrical measurements, and mechanical testing) into a single integrated instrument platform. This allows all measurements to be performed on the same sample without transfer, eliminating the risk of sample alteration while maintaining comprehensive measurement capabilities.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables reliable in-situ measurement and manipulation of nano-sized objects within a TEM, reducing the risk of sample alteration and providing comprehensive physical property analysis, with potential for cryogenic and varied environmental studies.

Implementation Method 1

The substrate structure may be adapted to be mounted directly or indirectly to a piezoelectric driven inertial slider device

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

said beams is made of a resistive material through which an electrical current may pass, wherein said arm will bend depending on applied current

Methodology Applied

Scientific EffectJoule heating: Joule Heating

Implementation Method 3

The three beams may be made of a piezo resistive material

Methodology Applied

Scientific EffectPiezoresistive effect: Piezoresistive Effect

Data Source

PatentUS7586105B2Microfabricated cantilever chip

Publication Date: 2009.09.08 FEI CO

AI summary

The present invention relates to a device and system from doing mechanical and electrical measurements and manipulation on nano or micro sized objects using a sample holder adapted to fit in situ of a transmission electron microscope. The sample holder comprise at least two arms each with at least one connector whereby the sample (206) may be mounted between the two connectors forming a bridge closing a gap between the two arms of the sample holder. The sample holder is arranged to provide mechanical forces to a sample mounted on the sample holder and measuring and/or applying electrical signals from the sample while at the same imaging using the transmission electron microscope. Each arm of the sample holder may comprise three substantially parallel beams for electro-thermal actuation.