Capacitive Coupling Probe for Noncontact Microdevice Cycle Testing
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Solution Overview
Problem
Measuring cycles of microdevices is challenging due to their small size and the difficulty of contact measurement, which can introduce defects and increase costs through post-processing steps.
Innovation Solution
A capacitive coupling method using a conductive layer covered by a dielectric to stimulate microdevices, combined with a switch in series to control the biasing status, and a time varying stimulating voltage signal to activate functions, ensuring the microdevices remain in a recoverable state.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If contact measurement methods are used to measure microdevice cycles, then measurement capability is achieved, but device defects increase and manufacturing costs increase due to post-processing requirements
Solution Approach 1:
The patent replaces mechanical contact measurement with a capacitive coupling measurement system. A probe applies a time-varying voltage signal through a capacitor formed by a conductive layer and dielectric to the microdevice under test, enabling non-contact measurement of device cycles without physical contact that would cause defects
Solution Approach 2:
The patent introduces a capacitor as an intermediary element between the probe and the microdevice. The capacitor, formed by the conductive layer and dielectric, couples the time-varying voltage signal to the device pad, enabling signal transmission without direct contact and thus avoiding device contamination or damage
2Measurement precision
If contact measurement methods are used to measure microdevice cycles, then measurement capability is achieved, but post-processing steps are required which increase manufacturing costs
Solution Approach 1:
The patent replaces mechanical contact measurement with a capacitive coupling measurement system that can be performed in-situ during device operation, eliminating the need for separate post-processing measurement steps and reducing overall manufacturing cost
3Ease of operation
If a time varying stimulating voltage signal is applied to activate microdevice functions, then device functionality is measured, but the device may enter irreversible states
Solution Approach 1:
The patent applies a time-varying stimulating voltage signal with periodic characteristics to activate device functions for measurement. The signal is applied in controlled cycles, allowing the device to be stimulated for measurement purposes and then returned to its initial state, enabling repeated measurements without permanent alteration
Solution Approach 2:
The patent changes the parameters of the stimulating voltage signal (amplitude, frequency, duty cycle) to control the activation of device functions. By carefully selecting and adjusting these parameters, the system can activate device functions for measurement while ensuring the device returns to a recoverable state, avoiding irreversible changes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and cost-effective measurement of microdevice cycles without causing irreversible states, maintaining device functionality and reducing defects.
Implementation Method 1
a stimulating capacitor that is formed by the conductive layer, the dielectric and a device pad
Implementation Method 2
an electrode made of a conductive layer covered by a dielectric to stimulate the microdevice
Data Source
AI summary
The present disclosure describes a probe design to measure cycles of microdevices. In particular, the probe comprises, electrodes, dielectric, stimulating capacitor, voltage stimulating source for time varying stimulating voltage signal and a series switch to control biasing condition. The probe structure further has a probe tip and resting pads (ring shape or otherwise) along with a leveling mechanism and apparatus. The disclosure also describes a method to measure cycles of microdevices using the probe structure.