Capacitive Touch Screen Panel Manufacturing with Half-Tone Mask
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Solution Overview
Problem
The existing electrostatic capacity type touch screen panel manufacturing process requires multiple mask processes, leading to increased time and cost due to the complexity of photolithography processes.
Innovation Solution
The process is optimized by using a half-tone mask to reduce the number of mask processes, allowing for the formation of first and second connection patterns and routing wires in a single step, and employing a lift-off process to form electrode serials, thereby simplifying the manufacturing process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple mask processes are used in the manufacturing process, then the manufacturing precision and quality of the touch screen panel are maintained, but the manufacturing time and cost increase due to process complexity
Solution Approach 1:
The patent combines multiple mask processes into a single mask process by designing a specific pattern structure where the electrode patterns and connection patterns are formed simultaneously. This merging of processes reduces the manufacturing cycle time while maintaining pattern formation precision through careful pattern design that allows both features to be created in one exposure and development step.
Solution Approach 2:
The patent employs preliminary patterning actions where the mask pattern is designed to pre-establish both electrode and connection patterns in a single configuration. This preliminary action eliminates the need for subsequent mask processes, as the single mask pattern is strategically designed to create all necessary conductive features before other manufacturing steps begin.
2Manufacturing precision
If multiple mask processes are used, then the quality of photolithography patterns is maintained, but the manufacturing cost increases due to process complexity
Solution Approach 1:
The patent merges multiple photolithography mask processes into a single mask process by designing a unified pattern structure. This consolidation reduces manufacturing cost by eliminating redundant mask materials, alignment procedures, and processing steps, while the carefully designed pattern geometry ensures that both electrode and connection patterns achieve the required quality standards in one exposure.
Solution Approach 2:
The single mask pattern serves multiple functions simultaneously: it defines both the electrode patterns and the connection patterns, acts as a template for both feature types, and enables both patterning operations in one step. This multi-functionality of the mask pattern reduces the overall number of photolithography processes needed while maintaining pattern quality.
3Manufacturing precision
If four mask processes are used, then the electrode patterns and connection patterns are formed with high precision, but the productivity decreases due to increased process steps
Solution Approach 1:
The patent merges four separate mask processes into a single mask process by designing an integrated pattern structure where electrode patterns and connection patterns are formed simultaneously. This merging dramatically increases productivity by reducing the number of process steps, while the specific pattern geometry ensures that both feature types maintain high formation precision through single-step exposure and development.
Solution Approach 2:
The patent uses preliminary action by designing the mask pattern to pre-establish all necessary electrode and connection patterns in one configuration before other manufacturing steps. This preliminary patterning action eliminates the need for three additional mask processes, thereby increasing manufacturing throughput while ensuring precise pattern formation through the carefully designed single-mask pattern structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the number of mask processes from four to two, decreasing manufacturing time and cost while maintaining the quality of the touch screen panel.
Implementation Method 1
employing a lift-off process to form electrode serials
Data Source
AI summary
A touch screen panel and a method of manufacturing the same are disclosed. The touch screen panel includes a substrate, an electrode forming part positioned on the substrate, and a routing wiring part positioned on the substrate outside the electrode forming part. The electrode forming part includes a plurality of first electrode serials arranged parallel to one another in a first direction and a plurality of second electrode serials arranged to cross the first electrode serials. The routing wiring part includes a plurality of first routing wires respectively connected to the first electrode serials and a plurality of second routing wires respectively connected to the second electrode serials. A plurality of first connection patterns are formed on the same level layer as the first and second routing wires to be separated from one another.