Capacitor Electrode Layout and Etchant Recovery for Flatness

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Solution Overview

Problem

Existing capacitor fabrication methods face issues such as mechanical waviness and brittleness due to masking during electrode formation, and the disposal of spent etching solutions containing sodium perchlorate, which is costly and environmentally harmful.

Innovation Solution

The capacitor design incorporates inactive regions with projections on the electrode to reduce mechanical strain and uses a recovery process to regenerate etching solutions by precipitating metal ions and adjusting chemical components, allowing for efficient reuse.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If masking is applied to the welded region during etching and oxide formation, then welding capability is enabled, but mechanical waviness and strain are introduced in the electrode

Engineering Contradiction:
Improvewelding capabilityVSAvoidelectrode flatness
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The electrode surface is segmented into active regions (with tunnels) and inactive regions (without tunnels) through selective masking. The inactive regions are strategically positioned to serve as strain relief zones that compensate for the mechanical waviness caused by masking during fabrication, thereby enabling welding while maintaining overall electrode flatness.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The etching parameters are modified in the inactive regions compared to the active regions. By controlling the etching process to create inactive regions without tunnels, the mechanical properties of these regions are changed to provide strain relief, counteracting the waviness introduced by the masking process itself.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If tunnels are widened before oxide formation, then oxide clogging is prevented, but mechanical strain and waviness are increased

Engineering Contradiction:
Improveoxide formation qualityVSAvoidelectrode flatness
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The electrode is segmented into regions with different tunnel characteristics. Inactive regions are created where no tunnels are formed, providing mechanical stability and strain relief that compensates for the waviness caused by tunnel widening in the active regions during oxide formation.

Inventive Principle:
Principle #1Segmentation

3Object-affected harmful factors

If spent etching solution is discarded, then contamination is avoided, but costly chemicals are wasted and environmental harm occurs

Engineering Contradiction:
Improveenvironmental contaminationVSAvoidetching solution
Core Design Contradiction:
Object-affected harmful factorsVSLoss of substance

Solution Approach 1:

Instead of discarding the spent etching solution, the process recovers and reuses the etching chemicals. The etching solution is filtered to remove dissolved metal ions and then reused for subsequent etching operations, preventing environmental contamination while eliminating chemical waste and reducing costs.

Inventive Principle:
Principle #34Discarding and recovering

Solution Approach 2:

The etching process is designed to be self-sustaining through solution recovery and reuse. The system automatically filters and recirculates the etching solution, maintaining its effectiveness for multiple cycles without requiring constant replacement, thereby preventing waste and environmental harm.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The new capacitor design minimizes mechanical waviness and warping, while the recovery process recovers valuable chemicals, reducing fabrication costs and environmental impact.

Implementation Method 1

In electrochemical etching and/or electrochemical drilling, a sheet of a material is at least partially immersed in a bath of etching solution

Methodology Applied
Scientific EffectElectrochemical etching: Electrolysis

Implementation Method 2

adding a precipitant to the spent etching solution so as to cause precipitation of a compound in a precipitation solution. The compound includes the metal ions from the sheet of material

Methodology Applied
Scientific EffectPrecipitation: Precipitation

Data Source

PatentUS12537142B2Fabrication of capacitors and recovery of capacitor fabrication materials
Publication Date: 2026.01.27 PACESETTER INC
  • US12537142B2 patent drawing
  • US12537142B2 patent drawing
  • US12537142B2 patent drawing

AI summary

Fabricating a capacitor include using a first etching solution to etch a first sheet of material so as to generate a spent etchant. At least one chemical component is recovered from the spent etchant. A second etching solution is used to etch a second sheet of material. The second etchant includes at least one of the chemical components that was recovered from the spent etchant.