Capillary Design for High Aspect Ratio Pillar Bumps

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Solution Overview

Problem

Conventional wire bond stud bumping methods result in low stud heights, leading to low bonding integrity and reliability, especially in fine pitch devices, as increasing bump heights requires larger pad sizes and pitch, which is not feasible for all applications.

Innovation Solution

A method using a capillary with a hole portion and a chamfer section to form pillar bumps by creating a free air ball, tensioning the bond wire, and applying a vacuum to withdraw the ball into the capillary, forming a tower with a higher aspect ratio, allowing for enhanced bonding capabilities while maintaining standard ball sizes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional capillary designs are used to form wire bond stud bumps, then the manufacturing process is simple, but the stud height is low resulting in poor bonding integrity and reliability

Engineering Contradiction:
Improvebonding integrityVSAvoidstud height
Core Design Contradiction:
ReliabilityVSLength of moving object

Solution Approach 1:

The capillary is divided into distinct functional sections: a cylindrical section with a specific diameter, a tapered section transitioning from the cylindrical section, and an outlet section. This segmentation allows each section to perform its specific function - the cylindrical section controls ball formation, the tapered section guides wire tensioning, and the outlet section enables pillar extrusion - thereby achieving high aspect ratio pillars with improved bonding integrity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention transitions from forming low aspect ratio studs to forming high aspect ratio pillars by changing the dimensional characteristics of the formed structure. The capillary geometry is specifically designed to extrude material in a controlled manner, creating a tall, narrow pillar structure rather than a short, wide stud, thus achieving the desired dimensional transformation

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Length of moving object

If bond wire diameter is increased to form taller bumps, then the bump height increases, but the pitch must also be increased which is not suitable for fine pitch devices

Engineering Contradiction:
Improvebump heightVSAvoidpad size and pitch
Core Design Contradiction:
Length of moving objectVSArea of stationary object

Solution Approach 1:

The capillary features a cylindrical section with a specific diameter (0.5mm to 1.0mm) that is optimized for forming the pillar base, followed by a tapered section that gradually reduces the diameter. This local variation in geometry allows the formation of tall, narrow pillars with controlled base diameter, enabling high bump heights without requiring increased pitch for fine pitch devices

Inventive Principle:
Principle #3Local quality

3Reliability

If conventional capillary designs are used, then the device complexity is low, but the aspect ratio of the stud is less than 1 limiting bonding reliability

Engineering Contradiction:
Improvebonding reliabilityVSAvoidcapillary structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The capillary design incorporates a tapered section that dynamically transitions from the cylindrical section to the outlet section, allowing the material to be progressively shaped during the extrusion process. This dynamic geometry enables the formation of high aspect ratio pillars with aspect ratios greater than 1, significantly improving bonding reliability while maintaining a relatively simple single-piece capillary structure

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method achieves higher aspect ratio pillar bumps, improving bonding reliability and enabling the use of standard free air ball sizes for smaller pitch applications, thus addressing the limitations of conventional capillary designs.

Implementation Method 1

applying a vacuum to the capillary to withdraw a portion of the FAB back into the capillary

Methodology Applied
Scientific EffectVacuum: Vacuum

Implementation Method 2

tensioning the bond wire

Methodology Applied
Scientific EffectTension: Tension

Data Source

PatentUS9209147B1Method of forming pillar bump
Publication Date: 2015.12.08 NXP USA INC
  • US9209147B1 patent drawing
  • US9209147B1 patent drawing
  • US9209147B1 patent drawing

AI summary

A method of forming a pillar bump includes feeding a bond wire in a capillary. The capillary has a hole portion and a chamfer section arranged downstream of the hole portion. The hole portion has a length along a feed direction of the bond wire that is greater than a maximum diameter of the hole portion. The method further includes performing an electric flame off (EFO) on a free end of the bond wire extending from the chamfer section to form a free air ball (FAB), tensioning the bond wire and applying a vacuum to the capillary to withdraw a portion of the FAB back into the capillary to substantially fill the hole portion for forming a tower, attaching the FAB to a bonding site, and at least partially removing the capillary from the bonding site and breaking the bond wire above the tower.