Capillary Shield for X-ray Fluorescence Analysis
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Solution Overview
Problem
X-ray fluorescence analysis apparatuses with superconducting transition edge sensors face inefficiencies in X-ray transmittance below 1 keV due to the need for multiple heat shields and organic membrane windows, leading to reduced detection efficiency compared to semiconductor detectors.
Innovation Solution
The apparatus incorporates a capillary electromagnetic wave shield with a through hole size of 50 μm or less and thinly formed laminate-type X-ray windows with aluminum and organic or silicon nitride membranes, allowing efficient transmission of X-rays while minimizing noise from visible light and infrared.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If multiple heat shields and organic membrane windows are used to ensure stable operation of the TES, then thermal stability is improved, but X-ray transmittance for energies below 1 keV deteriorates
Solution Approach 1:
The patent introduces a capillary electromagnetic wave shield with a through hole as an intermediary component between the sample and the TES. This capillary structure serves as a mediator that allows X-rays to pass through while blocking visible light and infrared radiation, thus protecting the TES from thermal noise without compromising X-ray transmission. The capillary acts as a selective filter that resolves the contradiction between thermal shielding and X-ray transmittance.
Solution Approach 2:
The patent employs a composite structure consisting of a capillary electromagnetic wave shield combined with thin laminate-type X-ray windows made of aluminum and organic or silicon nitride membranes. This composite configuration integrates the electromagnetic shielding function with the X-ray transmission function, achieving both thermal stability and high X-ray transmittance for low-energy X-rays below 1 keV.
2Object-affected harmful factors
If multiple heat shields and X-ray windows are used to shield against visible light and infrared light, then noise from visible light and infrared light is reduced, but the number and thickness of X-ray windows increase, reducing X-ray transmittance
Solution Approach 1:
The capillary electromagnetic wave shield serves as a single intermediary component that simultaneously blocks visible light and infrared radiation while allowing X-rays to pass through. This eliminates the need for multiple separate shielding components and thick window structures, reducing device complexity while maintaining effective noise shielding.
Solution Approach 2:
The capillary electromagnetic wave shield performs multiple functions simultaneously: it acts as an electromagnetic wave shield against visible light and infrared radiation, provides structural support, and maintains the vacuum seal. This multi-functionality reduces the overall number of components needed in the system.
3Reliability
If thin laminate-type X-ray windows are used to improve X-ray transmittance, then detection efficiency for energies below 1 keV is improved, but shielding against visible light and infrared light becomes insufficient
Solution Approach 1:
The capillary electromagnetic wave shield is positioned between the sample and the thin laminate-type X-ray windows, serving as a pre-shielding intermediary. This capillary structure blocks visible light and infrared radiation before they can reach the thin windows and the TES, allowing the windows to be made extremely thin for maximum X-ray transmittance while still maintaining effective thermal and optical shielding.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances X-ray transmittance and detection efficiency for energies below 1 keV, reducing the number and thickness of X-ray windows needed, thereby improving the operational stability and sensitivity of the X-ray fluorescence analysis.
Implementation Method 1
The electromagnetic wave shield is provided with a through hole portion on which a through hole through which the characteristic X-ray passes is formed
Implementation Method 2
The TES detects temperature changes in the TES occurring when a fluorescent X-ray or a characteristic X-ray generated from a sample by being irradiated with radiation such as a primary X-ray and a primary electron ray is incident
Implementation Method 3
The TES is also called as a micro calorimeter
Implementation Method 4
a highly sensitive calorimeter utilizing a rapid resistance change (for example, a temperature change is several mK, and a resistance change is 0.1Ω) of a thin metallic film during a transition between super-conduction and normal conduction
Implementation Method 5
The heat shield is provided with a window portion through which the characteristic X-ray is passed through
Data Source
AI summary
An X-ray fluorescence analysis apparatus is provided with: an excitation source configured to excite an analysis target sample to emit a characteristic X-ray; an X-ray detector configured to detect the characteristic X-ray emitted from the analysis target sample; and an electromagnetic wave shield and a heat shield that are sequentially arranged from the analysis target sample toward the X-ray detector. The electromagnetic wave shield is provided with a through hole portion on which a through hole through which the characteristic X-ray passes is formed, the through hole having a size equal to or smaller than 50 μm. The heat shield is provided with a window portion through which the characteristic X-ray is passed through.