Capillary X-Ray Focusing Optics With Aberration Correction for Submicron Focus
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing x-ray microbeam systems face challenges in achieving small x-ray focus sizes with high flux density due to limitations in x-ray focusing optics fabrication, particularly in producing small point spread functions without significant degradation in yield and fabrication time.
Innovation Solution
An x-ray microbeam apparatus comprising a capillary x-ray focusing optic and an x-ray optical component configured to correct figure errors, achieving a small focus size and low point spread function through the use of a refractive 3D optic and/or mask to compensate for aberrations in the capillary optic.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional capillary x-ray focusing optics are used, then high x-ray collection efficiency is achieved, but the point spread function is larger than desired (greater than 1 micron)
Solution Approach 1:
The system divides the x-ray focusing function into two separate components: a capillary x-ray focusing optic for collecting and initially focusing x-rays, and an x-ray optical component (such as a zone plate or refractive lens) for fine-tuning the focus and correcting aberrations. This segmentation allows each component to be optimized independently, achieving a collective point spread function below 1 micron while maintaining high collection efficiency.
Solution Approach 2:
An x-ray optical component is introduced as an intermediary element between the capillary optic and the sample. This intermediary component corrects figure errors and aberrations introduced by the capillary optic, enabling sub-micron point spread function without requiring the capillary optic itself to be fabricated with extremely high precision.
2Quantity of substance
If the x-ray focus size is reduced to increase flux density, then high flux density is achieved, but the working distance becomes insufficient
Solution Approach 1:
The system employs adjustable x-ray optical components that can dynamically optimize the balance between focus size and working distance. By adjusting the parameters of the refractive lens or zone plate, the system can achieve high flux density at the focus while maintaining an adequate working distance for sample manipulation and detection.
3Reliability
If axially symmetric capillary x-ray focusing optics are used, then high x-ray collection efficiency is achieved, but fabrication with small surface figure errors is challenging
Solution Approach 1:
The focusing system is segmented into a capillary optic that handles the bulk of x-ray collection (where moderate surface figure errors are acceptable) and a separate x-ray optical component that corrects the remaining aberrations to achieve the required sub-micron point spread function. This allows the capillary optic to be fabricated with relaxed tolerances while maintaining high collection efficiency.
Solution Approach 2:
The system uses the capillary optic's actual performance characteristics as feedback to design and position the corrective x-ray optical component. By measuring or characterizing the figure errors in the capillary optic, the corrective element can be optimized to compensate for these specific errors, achieving high precision without requiring the capillary optic itself to be perfectly fabricated.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus generates a focused x-ray beam with a focus size less than 10 microns, maintaining high flux density by correcting optical errors, thereby enhancing the performance of microanalytical applications such as microXRF and scanning x-ray microscopy.
Implementation Method 1
at least one capillary x-ray focusing optic configured to receive and focus at least some of the generated x-rays into a focused x-ray beam
Implementation Method 2
The at least one refractive 3D optic is configured to allow an x-ray beam to propagate through the refractive 3D optic, such that predetermined changes of phase and/or wavefront are applied to the propagating x-ray beam
Data Source
AI summary
An apparatus includes at least one x-ray source configured to generate x-rays and at least one capillary x-ray focusing optic configured to receive and focus at least some of the generated x-rays into a focused x-ray beam. The apparatus further includes at least one x-ray optical component configured to receive the generated x-rays and/or the focused x-ray beam such that a focus size δ1 of the focused x-ray beam is smaller than a focus size δ0 of the focused x-ray beam without the at least one x-ray optical component.