Carbon-Based Anisotropic Conductive Film for Fine-Pitch Die Interconnects

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Solution Overview

Problem

Conventional methods for forming electrical and mechanical connections between semiconductor dice with high density and small critical dimensions are complex, time-consuming, and require precise alignment, limiting the minimum vertical standoff distance and being pitch-and-pillar limited due to conductivity limitations.

Innovation Solution

Anisotropic conductive films with discrete, laterally-spaced regions of carbon-based material are used, which exhibit low electrical resistivity and are formed on a substrate before the adhesive dielectric material, allowing for thin, compact semiconductor device assemblies with improved electrical connectivity without the need for precise alignment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional methods with conductive pillars and underfill materials are used, then electrical and mechanical connections are established, but the process becomes complex and time-consuming

Engineering Contradiction:
Improveelectrical and mechanical connectionVSAvoidfabrication process
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent removes conductive pillars and underfill materials from the conventional stacking process, replacing them with anisotropic conductive film that provides both electrical connection and mechanical bonding in a single component, thereby simplifying the fabrication process while maintaining connection reliability

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The anisotropic conductive film serves multiple functions simultaneously: it provides electrical conductivity through conductive particles, mechanical adhesion through adhesive material, and structural support, eliminating the need for separate conductive pillars and underfill materials

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Manufacturing precision

If conventional alignment methods are used, then precise alignment is achieved, but the minimum vertical standoff distance is limited

Engineering Contradiction:
Improvealignment precisionVSAvoidvertical standoff distance
Core Design Contradiction:
Manufacturing precisionVSLength of stationary object

Solution Approach 1:

The patent segments the conductive material into discrete conductive particles within the anisotropic film, which can be compressed to make contact with bonding pads, allowing for precise electrical connection without requiring precise alignment of entire conductive structures, thereby enabling smaller vertical standoff distances

Inventive Principle:
Principle #1Segmentation

3Reliability

If conventional conductive materials are used, then electrical conductivity is achieved, but pitch and pillar limitations occur

Engineering Contradiction:
Improveelectrical conductivityVSAvoidpitch and pillar flexibility
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The patent changes the physical state and distribution of conductive material from solid conductive pillars to discrete conductive particles within a compressed film, allowing the particles to deform and conform to bonding pad surfaces, thereby enabling finer pitch spacing and greater flexibility in design

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The carbon-based anisotropic conductive films enable efficient electrical and mechanical connections between semiconductor dice, eliminating the need for conductive pillars and underfill materials, allowing for finer-pitched conductive elements and faster fabrication while maintaining electrical conductivity.

Implementation Method 1

The carbon-based material may exhibit extremely low electrical resistivity, enabling the ACF to effectively electrically connect conductive elements of adjoining dice

Methodology Applied
Scientific EffectElectrical Conductivity: Conduction (electrical)

Implementation Method 2

The ACF may also be formed with adhesive dielectric material on opposing sides of the ACF

Methodology Applied
Scientific EffectAdhesion: Adhesive

Data Source

PatentUS11881468B2Anisotropic conductive film with carbon-based conductive regions and related semiconductor device assemblies and methods
Publication Date: 2024.01.23 MICRON TECHNOLOGY INC
  • US11881468B2 patent drawing
  • US11881468B2 patent drawing
  • US11881468B2 patent drawing

AI summary

An anisotropic conductive film (ACF) is formed with an ordered array of discrete regions that include a conductive carbon-based material. The discrete regions, which may be formed at small pitch, are embedded in at least one adhesive dielectric material. The ACF may be used to mechanically and electrically interconnect conductive elements of initially-separate semiconductor dice in semiconductor device assemblies. Methods of forming the ACF include forming a precursor structure with the conductive carbon-based material and then joining the precursor structure to a separately-formed structure that includes adhesive dielectric material to be included in the ACF. Sacrificial materials of the precursor structure may be removed and additional adhesive dielectric material formed to embed the discrete regions with the conductive carbon-based material in the adhesive dielectric material of the ACF.