Rotating Carrier Arm Thermometry for Susceptor Temperature Control
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Solution Overview
Problem
The existing method for setting the temperature of a susceptor in wafer processing is time-consuming and infrequent, leading to outdated offset data and non-ideal substrate processing temperatures due to the long downtime required for chamber operations and temperature measurements.
Innovation Solution
A substrate carrier apparatus with rotating carrier arms equipped with thermometers that allow for continuous temperature measurement and frequent updating of offset data, enabling precise temperature control of susceptors during substrate processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the temperature measurement is performed using the existing method with temperature measuring wafer, then the offset data can be obtained, but the downtime is long and the measurement frequency is low
Solution Approach 1:
A thermometer is introduced as an intermediary device mounted on the carrier arm to directly measure the susceptor temperature during normal substrate processing operations, eliminating the need for separate measurement operations with temperature measuring wafers
Solution Approach 2:
The thermometer enables continuous temperature measurement during substrate processing without interrupting the normal workflow, allowing offset data to be updated frequently without requiring chamber opening/closing or temperature cycling operations
2Manufacturing precision
If the offset data is updated frequently, then the substrate processing temperature accuracy is improved, but the chamber operations time increases
Solution Approach 1:
The thermometer serves as a mediator that enables temperature measurement without requiring chamber opening or closing, allowing frequent offset updates without impacting chamber throughput
Solution Approach 2:
The measurement system performs temperature measurement as part of the normal substrate processing operation itself, rather than requiring separate dedicated measurement operations, thus maintaining high productivity while achieving frequent updates
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables rapid and accurate temperature adjustments, ensuring that substrates are processed at desired temperatures by frequently updating offset data, thereby improving processing efficiency and consistency.
Implementation Method 1
at least one thermometer fixed to the carrier arm
Data Source
AI summary
Examples of a substrate processing apparatus includes a substrate carrier apparatus including a shaft, at least one carrier arm that is fixed to the shaft and rotates as the shaft rotates, and at least one thermometer fixed to the carrier arm, a susceptor, a heater that heats the susceptor, a temperature regulator that controls the heater, and a control unit that acquires a measured temperature, which is a surface temperature, of the susceptor obtained by the thermometer by bringing the carrier arm close to the susceptor and control the temperature regulator.