Thin Disk Workpiece Carrier Notch Trigger Segmentation

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Conventional carrier apparatuses for thin disk-shaped workpieces, such as semiconductor wafers, face issues with high part replacement costs, structural complexity, material costs, and precision defects due to worn components and cantilever-like structures, especially when using larger grinding wheels.

Innovation Solution

A carrier apparatus with an annular carrier main body and a separate, exchangeable notch trigger with a pointed end engaging part, where the notch trigger is integrally joined to the carrier main body using adhesive, allowing for reduced part count, improved rigidity, and minimized material costs, while preventing deflection and maintaining high precision.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If multiple fixed and movable carrier bodies are used to position the workpiece, then the workpiece positioning is achieved, but the number of parts increases and the structure becomes complicated

Engineering Contradiction:

Improveworkpiece positioningVSAvoidcarrier bodies structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges the multiple fixed and movable carrier bodies into a single integrated annular carrier main body with a continuous inner peripheral edge. This consolidation maintains the workpiece positioning function while eliminating the complexity of multiple separate parts and their associated mounting mechanisms.

Inventive Principle:

Principle #5Merging (Combining)

2Ease of repair

If the notch trigger is formed as a separate part mounted on the carrier ring, then the notch trigger can be replaced frequently, but it projects inward like a cantilever and may deflect significantly when load is applied

Engineering Contradiction:

Improvenotch trigger replacementVSAvoidnotch trigger rigidity

Core Design Contradiction:

Ease of repairVSStrength

Solution Approach 1:

The notch trigger is integrally joined to the carrier main body, eliminating the cantilever structure and its associated deflection problems. The integral construction provides superior rigidity and strength while maintaining the ability to replace the notch trigger when worn, as it remains a separate functional component attached to the carrier main body.

Inventive Principle:

Principle #5Merging (Combining)

3Device complexity

If the carrier main body and notch trigger are formed as one piece, then the structure is simplified, but when the notch trigger portion is worn, the entire carrier main body must be replaced

Engineering Contradiction:

Improvecarrier structureVSAvoidcost of replacement

Core Design Contradiction:

Device complexityVSEase of manufacture

Solution Approach 1:

The carrier apparatus is segmented into two functional parts: the carrier main body and the notch trigger. The notch trigger is designed as a separate component that can be attached to or replaced on the carrier main body. This segmentation allows the expensive carrier main body to be reused while only replacing the worn notch trigger, significantly reducing replacement costs.

Inventive Principle:

Principle #1Segmentation

4Shape

If the notch trigger is made thin to engage with the workpiece notch, then it can fit properly, but a rigid material is demanded and material cost increases

Engineering Contradiction:

Improvenotch trigger thicknessVSAvoidmaterial cost

Core Design Contradiction:

ShapeVSEase of manufacture

Solution Approach 1:

The patent employs composite material construction for the carrier main body, combining materials with different properties to achieve both the required thin profile for proper engagement and the necessary rigidity. This composite approach allows the use of cost-effective material combinations rather than requiring expensive single-material solutions throughout.

Inventive Principle:

Principle #40Composite materials

Data Source

PatentEP2705930B1Carrier apparatus of thin disk-shaped workpiece, method of manufacturing the same, and both-side grinding machine

Publication Date: 2022.02.16 KOYO MASCH IND CO LTD

Figure 1
Figure 2
Figure 3

AI summary

A carrier apparatus (6) simple and inexpensive in structure, and capable of assuring machining at high efficiency and high precision, in machining of a surface of a thin disk-shaped workpiece (W). In an apparatus for grinding the surface of a workpiece (W) while supporting and rotating a thin disk-shaped workpiece (W), the carrier apparatus (6) constitutes a workpiece rotation supporting device (5) for rotating and driving while positioning and supporting the circular outer circumference of the workpiece (W), and comprises an annular carrier main body (31) having a circular inner peripheral edge (31a) surrounding closely the whole circumference of the workpiece (W), and a notch trigger (32) having a pointed end engaging part (32b) to be engaged with a notch (Wn) in the workpiece (W), being formed as an integral piece, in which the notch trigger (32) is a separate part from the carrier main body (31), so as to be exchangeable and joined and fixed integrally, and the pointed end engaging part (32b) has a mounting structure of projecting inward in a radial direction from a part of the circular inner peripheral edge (31a) of the carrier main body (31).