Halogen Plasma Resistant Ceramic Bonding via Glass-Ceramic Transition
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Solution Overview
Problem
Ceramic components used in plasma processing equipment face challenges in maintaining mechanical strength and resistance to reactive plasmas, as they are difficult to machine into complex shapes and exhibit lower mechanical properties compared to materials like aluminum oxide and silicon carbide, necessitating improved bonding methods for enhanced plasma resistance and longevity.
Innovation Solution
A glass-ceramic bonding agent comprising metal oxides and fluorides, such as Al2O3 and YF3, is applied between ceramic substrates and co-fired to form a transition layer, providing improved cohesive strength and corrosion resistance, with the bonding layer being either amorphous, crystalline, or a combination of both, which reacts with the substrates to form new compounds enhancing the bond's mechanical properties and plasma resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If ceramic materials are used for plasma processing components to provide plasma resistance, then corrosion resistance is improved, but mechanical strength decreases
Solution Approach 1:
The patent employs composite material structures by bonding ceramic substrates with lower plasma resistance but higher mechanical strength to ceramic substrates with higher plasma resistance. The bonding agent creates a transition layer that combines the advantages of both materials, achieving a balance between mechanical strength and plasma resistance that neither material could provide alone.
2Reliability
If advanced plasma-resistant ceramics are used to improve corrosion resistance, then plasma resistance is improved, but ease of manufacture worsens
Solution Approach 1:
The patent divides the ceramic component into multiple segments or sections that can be manufactured separately using different materials optimized for specific functions. One section can be made from easily machinable ceramic with lower plasma resistance, while another section is made from highly plasma-resistant but difficult-to-machine ceramic. The bonding agent joins these segments into a functional whole, allowing each part to be manufactured independently with appropriate machining processes.
3Duration of action of stationary object
If ceramic components are bonded to extend lifetime, then duration of action is improved, but bonding reliability worsens due to particle formation and metal contamination
Solution Approach 1:
The patent introduces a bonding agent as an intermediary material between ceramic substrates. This bonding agent forms a transition layer that prevents direct contact and potential contamination between the ceramic surfaces, while providing strong adhesion. The transition layer acts as a barrier that reduces particle formation and metal contamination at the bond interface, thereby maintaining bonding reliability while extending the component's lifetime through successful bonding.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The glass-ceramic bonding layer significantly reduces particle formation and metal contamination, extends the lifetime of plasma processing components, and provides a strong, corrosion-resistant bond between ceramic substrates, improving the mechanical strength and plasma resistance of the bonded structure.
Implementation Method 1
the bonding layer being either amorphous, crystalline, or a combination of both, which reacts with the substrates to form new compounds enhancing the bond's mechanical properties and plasma resistance
Implementation Method 2
typically a powder of the ceramic is placed into a suspending medium, to which a binder composition is added, this combination of ingredients produces a slurry which is applied over a substrate which is to be coated, and then the slurry is sintered under controlled time, temperature and environmental conditions
Implementation Method 3
During sintering, when the fluid coating material is cooled rapidly, typically a glaze is produced; when the coating material is cooled slowly, a glass-ceramic may be obtained
Data Source
AI summary
A bonded ceramic component which is resistant to reactive halogen-containing plasmas, said component comprising ceramic portions which are bonded together by a bonding material which includes an oxyfluoride glass-ceramic-comprising transition area between interfaces of the ceramic portions, where the transition area includes from at least 0.1 volume % amorphous phase up to about 50 volume % amorphous phase.