Ceramic Electrostatic Chuck Assembly for Void-Free High-Voltage Insulation
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Solution Overview
Problem
The existing ceramic joined bodies in electrostatic chuck devices suffer from voids at the interface of ceramic plates, leading to reduced withstand voltage and potential breakdown when high voltage is applied, as charges accumulate and discharge, compromising the integrity of the ceramic plates.
Innovation Solution
A ceramic joined body is designed with a pair of ceramic plates and an electrode layer interposed between them, featuring an insulating layer made of insulating and conductive materials, such as Al2O3 and SiC, with a lower relative density at the outer edge of the electrode layer to prevent charge accumulation and discharge.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If high voltage is applied to the dielectric layer for electrostatic adsorption, then the electrostatic chuck function is enhanced, but charges accumulate in voids and discharge causing breakdown
Solution Approach 1:
The insulating layer serves as a mediator that prevents charge accumulation in voids. By providing a continuous insulating barrier between the electrode and ceramic plates, it eliminates the void spaces where charges would otherwise accumulate and discharge, thereby preventing breakdown while allowing high voltage to be applied for enhanced electrostatic chucking.
2Ease of manufacture
If the electrode layer is formed directly on the ceramic plate surface, then the manufacturing process is simplified, but fine spaces (voids) remain at the interface reducing breakdown resistance
Solution Approach 1:
The insulating layer acts as an intermediary that is applied between the electrode layer and ceramic plate, ensuring complete coverage and eliminating interface voids. This approach maintains manufacturing simplicity while significantly improving interface quality by providing a continuous insulating barrier that prevents charge accumulation and breakdown.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses breakdown in ceramic plates under high voltage conditions, enhancing the electrostatic chuck device's reliability and performance by maintaining voltage endurance and preventing discharge-related failures.
Implementation Method 1
an insulating layer that is disposed in a periphery of the electrode layer between the pair of ceramic plates, in which the insulating layer is formed of an insulating material and a conductive material
Implementation Method 2
a plate-shaped sample such as a silicon wafer is fixed to an electrostatic chuck member having an electrostatic chuck function by electrostatic adsorption
Implementation Method 3
the coolant for adjusting a temperature is circulated for heat exchange to the flow path of the base member for adjusting a temperature
Data Source
AI summary
A ceramic joined body includes: a pair of ceramic plates; and an electrode layer and an insulating layer that are interposed between the pair of ceramic plates and, in which the insulating layer is formed of an insulating material and a conductive material.