Ceramic Coating Conditioning for Plasma Chamber Arcing

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Solution Overview

Problem

Ceramic coatings in plasma processing chambers face challenges with contamination, electrostatic charging, and extended seasoning times, leading to increased downtime and potential damage due to arcing.

Innovation Solution

A method involving wetting the ceramic coating with a solvent and weak electrolyte solution, followed by blasting with dry ice particles and rinsing with pressurized deionized water, then drying to reduce contamination and electrostatic charging, and minimize seasoning requirements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If ceramic coating is used to protect parts in plasma processing chamber, then damage resistance is improved, but contamination and electrostatic charging occur leading to arcing

Engineering Contradiction:

Improvedamage resistanceVSAvoidcontamination and electrostatic charging

Core Design Contradiction:

StrengthVSObject-affected harmful factors

Solution Approach 1:

The ceramic coating undergoes conditioning treatment before plasma processing to prevent contamination and electrostatic charging. The coating is wetted with solution, blasted with particles, rinsed, and dried in advance to remove contaminants and reduce charging susceptibility, thereby preventing arcing before it occurs

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The surface properties of the ceramic coating are modified through conditioning parameters including solution composition (solvent and electrolyte mixture), particle blasting parameters, and drying conditions. These parameter changes alter the surface energy and contamination resistance of the coating without compromising its protective function

Inventive Principle:

Principle #35Parameter changes

2Object-affected harmful factors

If traditional seasoning process is used for ceramic coating, then contamination is reduced, but extended seasoning time increases downtime

Engineering Contradiction:

ImprovecontaminationVSAvoidseasoning time

Core Design Contradiction:

Object-affected harmful factorsVSLoss of time

Solution Approach 1:

The traditional extended seasoning process is replaced with a mechanical-chemical conditioning process involving solution wetting, particle blasting, and rapid drying. This substitution achieves contamination reduction in significantly less time through physical removal and chemical treatment mechanisms

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The conditioning process utilizes phase transitions including liquid solution application, particle impact, and rapid evaporation/drying to efficiently remove contaminants. The phase change from liquid to vapor during drying accelerates the contamination removal process compared to traditional gradual seasoning

Inventive Principle:

Principle #36Phase transitions

3Object-affected harmful factors

If ceramic coating is blasted with particles to remove contamination, then contamination is reduced, but electrostatic charging increases causing arcing

Engineering Contradiction:

ImprovecontaminationVSAvoidelectrostatic charging

Core Design Contradiction:

Object-affected harmful factorsVSObject-generated harmful factors

Solution Approach 1:

A solution consisting of solvent and electrolyte is applied as an intermediary during particle blasting. This solution layer moderates the interaction between particles and coating, enabling contamination removal while controlling electrostatic charging through the electrolyte's conductive properties

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The electrolyte concentration and solution composition are optimized to balance contamination removal efficiency with electrostatic charging control. The specific parameter range of electrolyte dissociation (1%-10%) is selected to provide sufficient conductivity for charge dissipation while maintaining effective particle blasting capability

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method effectively reduces contamination, prevents arcing, and shortens the seasoning process, enhancing the durability and efficiency of ceramic coatings in plasma processing environments.

Implementation Method 1

the solution is formed by mixing a solvent with an electrolyte, wherein from 1% to 10% of the electrolyte dissociates in the solution

Methodology Applied

Scientific EffectElectrolyte dissociation: Electrolysis

Implementation Method 2

The ceramic coating is blasted with particles

Methodology Applied

Scientific EffectAblation: Ablation

Implementation Method 3

The ceramic coating is blasted with particles

Methodology Applied

Scientific EffectImpact force: Impact Force

Implementation Method 4

The ceramic coating is rinsed

Methodology Applied

Scientific EffectFluid flow: Fluid Spray

Implementation Method 5

drying to reduce contamination

Methodology Applied

Scientific EffectEvaporation: Evaporation

Data Source

PatentUS11384430B2Method for conditioning a ceramic coating

Publication Date: 2022.07.12 LAM RES CORP

AI summary

A method for conditioning ceramic coating on a part for use in a plasma processing chamber is provided. The ceramic coating is wetted with a solution, wherein the solution is formed by mixing a solvent with an electrolyte, wherein from 1% to 10% of the electrolyte dissociates in the solution. The ceramic coating is blasted with particles. The ceramic coating is rinsed.