Ceramic Particle Composite for Fluorine Removal in Waste Liquid

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Solution Overview

Problem

The treatment of hydrofluoric acid-containing waste liquids in the semiconductor industry generates large amounts of sludge through neutralization, which is costly and wasteful, and current methods are inefficient in recycling and removing fluorine, leading to environmental pollution.

Innovation Solution

A method involving ceramic particles embedded in a calcium fluoride bulk, with a specific composition and ratio, is used to form calcium fluoride layers that wrap the ceramic particles, effectively removing fluorine from waste liquids by adjusting pH and using a calcium source, thereby forming a dense calcium fluoride bulk that can be easily collected and reused.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If neutralization treatment is used to treat hydrofluoric acid-containing waste liquid, then fluorine removal is achieved, but large amounts of fine sludge are produced which is difficult and costly to handle

Engineering Contradiction:
Improvefluorine removal efficiencyVSAvoidsludge generation
Core Design Contradiction:
Quantity of substanceVSLoss of substance

Solution Approach 1:

The patent changes the chemical parameters of the treatment process by using ceramic particles with specific surface properties and controlling pH levels, transforming the neutralization process to form coarse calcium fluoride precipitates instead of fine sludge. The ceramic particles act as nucleation sites that promote formation of larger, easier-to-handle precipitates.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite materials consisting of ceramic particles embedded in a calcium fluoride bulk matrix. This composite structure allows the ceramic particles to serve as functional cores for fluorine removal while the calcium fluoride bulk provides a stable, reusable matrix that prevents sludge formation and enables easy separation and recycling of the treatment material.

Inventive Principle:
Principle #40Composite materials

2Quantity of substance

If conventional neutralization treatment is used, then fluorine is removed, but treatment cost increases due to handling requirements

Engineering Contradiction:
Improvefluorine concentration reductionVSAvoidtreatment cost
Core Design Contradiction:
Quantity of substanceVSEase of manufacture

Solution Approach 1:

The patent implements a recovery system where the ceramic particles embedded in calcium fluoride bulk are easily separated from the treated liquid, dried, and reused in subsequent treatment cycles. This recovery process eliminates the need to discard the treatment material, significantly reducing operational costs compared to conventional methods where sludge must be disposed of.

Inventive Principle:
Principle #34Discarding and recovering

Solution Approach 2:

The ceramic particles serve as self-regulating treatment agents due to their specific surface properties and chemical composition, enabling them to continuously remove fluorine from waste liquid without requiring external intervention. The particles maintain their structural integrity and reactivity across multiple treatment cycles, providing autonomous fluorine removal functionality.

Inventive Principle:
Principle #25Self-service

3Quantity of substance

If calcium fluoride is produced as fine sludge, then fluorine removal is achieved, but resource waste increases due to inability to reuse

Engineering Contradiction:
Improvefluorine precipitationVSAvoidresource waste
Core Design Contradiction:
Quantity of substanceVSLoss of substance

Solution Approach 1:

The patent segments the treatment material into discrete ceramic particles embedded within a calcium fluoride bulk matrix. This segmentation allows the material to be easily separated from the liquid phase through simple filtration or sedimentation, enabling drying and reuse. The segmented structure prevents the formation of fine, hard-to-separate sludge while maintaining effective fluorine removal capability.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method significantly reduces fluorine concentration in waste water, allowing for its recycling and reduces the formation of sludge, making the process more economical and environmentally friendly by producing a solid calcium fluoride bulk that can be easily dried and reused.

Implementation Method 1

forming a plurality of calcium fluoride layers (11) wrapping each of the ceramic particles (13)... the calcium fluoride layers (11) are connected to form a calcium fluoride bulk (15)

Methodology Applied
Scientific EffectPrecipitation: Precipitation

Implementation Method 2

providing a calcium source and a plurality of ceramic particles (13) to a waste liquid containing fluorine for forming a plurality of calcium fluoride layers (11)

Methodology Applied
Scientific EffectChemical reaction: Chemical Bonding

Data Source

PatentEP3838847B1Composite material and method of removing fluorine in waste liquid
Publication Date: 2024.04.17 IND TECH RES INST
  • EP3838847B1 patent drawingFigure 1
  • EP3838847B1 patent drawingFigure 2
  • EP3838847B1 patent drawingFigure 3

AI summary

A method of removing fluorine in waste liquid is provided, which includes providing a calcium source and a plurality of ceramic particles (13) to a waste liquid containing fluorine for forming a plurality of calcium fluoride layers (11) wrapping each of the ceramic particles (13). The calcium fluoride layers (11) are connected to form a calcium fluoride bulk (15). The ceramic particles (13) are embedded in the calcium fluoride bulk (15). The ceramic particles (13) and the calcium fluoride bulk (15) have a weight ratio of 1:4 to 1:20.