Ceramic Heater Electrode Interface for Lower Contact Resistance
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Solution Overview
Problem
The existing ceramic heaters used in semiconductor manufacturing processes experience increased contact resistance and defects due to point contact between the high-frequency electrode and the rod connecting member, which is exacerbated by higher frequencies required for improved throughput.
Innovation Solution
The ceramic heater design features a high-frequency electrode with a horizontal cross-sectional portion in area contact with the electrode rod connecting member, processed to ensure a contact area greater than a critical value, and attached via a brazing process to reduce contact resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If point contact is used between the high-frequency electrode and the rod connecting member, then the device complexity is reduced, but the contact resistance increases and reliability deteriorates
Solution Approach 1:
The patent transitions from point contact (0D) to area contact (2D) by forming a plate-shaped high-frequency electrode that makes broad contact with the rod connecting member. This dimensional change increases the contact area, reduces contact resistance, and improves reliability without significantly increasing device complexity.
Solution Approach 2:
The patent applies local quality by creating a plate-shaped electrode with specific geometric properties (length and width dimensions) at the contact region. This localized structural modification ensures low contact resistance at the critical interface between the electrode and rod connecting member, while the rest of the device maintains its original design.
2Productivity
If higher frequency is used to increase throughput, then productivity is improved, but contact resistance increases and defects occur
Solution Approach 1:
The patent changes the geometric parameters of the high-frequency electrode, specifically increasing its length and width to create a plate shape. This parameter modification increases the contact area with the rod connecting member, reducing contact resistance and preventing defects even at higher operating frequencies required for improved throughput.
3Reliability
If area contact is implemented between the electrode and rod connecting member, then contact resistance is reduced, but manufacturing precision requirements increase
Solution Approach 1:
The patent incorporates the rod connecting member within the ceramic molded body during the sintering process, before final assembly. This preliminary positioning ensures precise alignment and stable area contact between the high-frequency electrode and the rod connecting member, reducing manufacturing precision requirements for subsequent assembly steps.
Solution Approach 2:
The patent uses a composite structure where the rod connecting member is embedded in the ceramic molded body. This composite design provides both mechanical support and precise positioning, ensuring stable area contact while simplifying the manufacturing process through integrated fabrication.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively reduces contact resistance and enhances the reliability of the ceramic heater, preventing defects and ensuring stable electrical connections.
Implementation Method 1
attached via a brazing process to reduce contact resistance
Data Source
AI summary
The present invention relates to a ceramic heater with improved reliability, the ceramic heater including: a heater body having a mesh type high-frequency electrode, and an electrode rod connecting member being in contact with a lower surface of the high-frequency electrode; and a heater support mounted on a lower portion of the heater body and configured to support the heater body, in which the electrode rod connecting member is in area contact with one surface of the high-frequency electrode.