Ceramic Heater Volume Resistivity Gradient for Power and Uniformity
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Solution Overview
Problem
Existing ceramic heaters struggle to achieve both reduced power consumption through increased resistance and in-plane temperature uniformity, especially with the anticipated increase in power supply voltage to 440 V or more in semiconductor manufacturing.
Innovation Solution
A ceramic heater design where the resistance heating element's volume resistivity is gradually increased as the distance from the center of the ceramic plate increases, with specific ratios of volume resistivity in the intermediate and outer peripheral portions adjusted within predetermined ranges to achieve both reduced power consumption and temperature uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If the resistance value of the resistance heating element is increased to reduce power consumption, then power consumption is reduced, but in-plane temperature uniformity deteriorates
Solution Approach 1:
The patent applies local quality by dividing the heating element into multiple zones with different resistance characteristics. The inner peripheral zone has a first resistance value while the outer peripheral zone has a second resistance value, allowing each zone to contribute differently to heating. This spatial variation in resistance distribution enables both reduced overall power consumption and maintained temperature uniformity across the heating surface.
Solution Approach 2:
The patent changes the resistance parameter of the heating element by using different resistance values in different zones. Specifically, the ratio of the first resistance value to the second resistance value is controlled within a predetermined range, optimizing the balance between power consumption and temperature uniformity. This parameter optimization allows the system to achieve both energy efficiency and thermal performance.
2Loss of energy
If the power supply voltage is increased to reduce power loss in the manufacturing plant, then power loss is reduced, but the ceramic heater must adapt to high voltage conditions
Solution Approach 1:
The patent addresses voltage adaptation by optimizing the resistance characteristics of the heating element. By controlling the resistance values and their ratios in different zones, the system can operate efficiently at higher voltages while maintaining temperature uniformity. This parameter optimization enables the ceramic heater to adapt to high voltage power supply conditions (440V or more) that reduce overall plant power loss.
3Device complexity
If the resistance heating element uses a single resistance value, then the structure is simple, but both power consumption and temperature uniformity cannot be optimized simultaneously
Solution Approach 1:
The patent segments the heating element into multiple zones with different resistance characteristics. The inner peripheral zone and outer peripheral zone each have distinct resistance values, allowing independent optimization of their heating contributions. This segmentation enables the system to reduce overall power consumption while maintaining temperature uniformity, achieving performance optimization that a single-resistance design cannot provide.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed design effectively reduces power consumption by increasing resistance while maintaining in-plane temperature uniformity, addressing the challenges posed by higher voltage requirements in semiconductor manufacturing.
Implementation Method 1
a resistance heating element embedded in the center portion, the intermediate portion, and the outer peripheral portion in the ceramic plate
Data Source
AI summary
There is provided a ceramic heater including a ceramic plate including a center portion within a radius of 60 mm, an intermediate portion having a radius of 80 to 120 mm, and an outer peripheral portion having a radius of 130 mm or more; and a resistance heating element embedded in the ceramic plate. The resistance heating element is configured such that a volume resistivity of the resistance heating element is gradually increased as a distance from the center is increased. When the volume resistivity of the resistance heating element at an outer edge of the center portion is 100%, a ratio of the volume resistivity of the resistance heating element in the intermediate portion is within a range of 102 to 120%, and a ratio of the volume resistivity of the resistance heating element in the outer peripheral portion is within a range of 108 to 139%.