Ceramic Heater Shaft Connection for Reliable Embedded Heater Contacts
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Solution Overview
Problem
The reliability of electrical connection between resistance heating elements and conductive films in ceramic heaters with a shaft is low due to the use of wires, which can disconnect during manufacturing or use.
Innovation Solution
A ceramic heater with a shaft that includes a recessed section to house a connection member, which electrically connects the terminal of the resistance heating element to the conductive film, enhancing the surface contact and reliability of the electrical connection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If wires are used to connect resistance heating elements and conductive films, then the device structure is simple, but the reliability of electrical connection is low
Solution Approach 1:
The connection member integrates both electrical connection and mechanical support functions into a single component. It combines conductive material for electrical connectivity with structural features (recessed section, surface contact areas) for mechanical stability, eliminating the need for separate wire connections and supporting structures.
Solution Approach 2:
The connection member acts as an intermediary component between the resistance heating element terminal and the conductive film. It provides a dedicated interface structure with surface contact areas that mediate the electrical connection, replacing direct wire-to-surface contact and improving connection reliability through controlled surface engagement.
2Adaptability or versatility
If multiple resistance heating elements are accommodated using rods, then the structure is simple, but the number of heating elements is limited
Solution Approach 1:
The solution transitions from a one-dimensional rod-based power supply structure to a two-dimensional surface-based conductive film structure. The conductive film extends across the inner circumferential surface of the ceramic shaft, providing multiple independent contact points for multiple heating elements, thereby increasing adaptability without proportionally increasing structural complexity.
Solution Approach 2:
The conductive film is divided into multiple independent conductive regions or segments, each capable of connecting to a separate resistance heating element. This segmentation allows multiple heating elements to be accommodated independently on the same ceramic shaft, enhancing versatility while maintaining a unified structural approach.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The use of a connection member in a recessed section significantly increases the reliability of the electrical connection between the resistance heating elements and the conductive films, compared to wire connections, while also allowing for more resistance heating elements to be accommodated.
Implementation Method 1
a connection member which is filled in the recessed section, and electrically connects the lower surface of the terminal and the surface of the conductive film
Implementation Method 2
a ceramic plate in which resistance heating element is embedded
Data Source
AI summary
A ceramic heater with a shaft includes: a ceramic plate in which resistance heating element is embedded; a hollow ceramic shaft bonded to the surface on an opposite side of a wafer placement surface of the ceramic plate; a conductive film provided in an axial direction to extend on the internal circumferential surface of the ceramic shaft; a recessed section provided to reach a terminal of the resistance heating element from the surface on the opposite side of the wafer placement surface of the ceramic plate, the recessed section having a bottom surface to which a lower surface of the terminal is exposed and a lateral surface to which a surface of the conductive film is exposed; and a connection member which is filled in the recessed section, and electrically connects the lower surface of the terminal and the surface of the conductive film.