Ceramic Heater With Central Non-Coiled Wire for Uniform Heating
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Solution Overview
Problem
Conventional ceramic heaters experience temperature variations and cool zones due to the arrangement of coil-shaped heating elements, leading to non-uniform heating and potential cracking from thermal stress, which affects the uniformity and durability of substrates during processes like thin film deposition and etching.
Innovation Solution
The ceramic heater incorporates a combination of coiled and non-coiled wire heating elements, with the non-coiled wire arranged in the central portion and coiled wire in the peripheral areas, to enhance heat generation and reduce thermal overlap, ensuring uniform temperature distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If coil-shaped heating element is used in conventional ceramic heater, then heating capability is provided, but temperature uniformity deteriorates due to cool zones in central portion and thermal overlap in peripheral areas
Solution Approach 1:
The heating element is segmented into multiple independent sections: a first heating section with coiled wire in the outer peripheral area, a second heating section with non-coiled wire in the central portion, and optionally a third heating section with coiled wire in the inner peripheral area. This segmentation allows each section to be optimized independently for its specific thermal requirements, eliminating the temperature uniformity issues caused by using a single coil-shaped heating element throughout.
Solution Approach 2:
Different wire configurations are applied to different spatial locations based on local thermal requirements: non-coiled wire is used in the central portion where heat generation needs to be enhanced without causing thermal overlap, while coiled wire is used in peripheral areas where higher heat generation capability is needed. This local quality approach optimizes temperature distribution across the entire ceramic plate.
2Temperature
If density of coil-shaped heating element is increased to compensate for heat loss in cool zone, then heat generation in central portion is improved, but cracks form in ceramic plate due to thermal stress
Solution Approach 1:
The wire configuration parameter is changed from coiled to non-coiled in the central portion heating section. This parameter change allows for higher heat generation density in the central area without creating the thermal stress concentrations that lead to cracking, as the non-coiled wire distribution provides more uniform heat generation without the localized hot spots that occur in densely packed coil configurations.
3Area of stationary object
If two-zone heating element with inner and outer zones is used, then heating coverage is improved, but localized temperature increase occurs due to thermal overlap between zones
Solution Approach 1:
The heating element uses different wire configurations in different zones to prevent thermal overlap: non-coiled wire in the central portion provides controlled heat generation without the intensity that causes thermal overlap, while coiled wire in outer zones provides adequate heating coverage. This local differentiation eliminates the localized temperature increases that occur when uniform high-density heating is applied across all zones.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration increases heat generation in the central portion, accelerates temperature uniformity, and prevents localized temperature increases, thereby improving the uniformity and durability of the ceramic heater.
Implementation Method 1
a ceramic heater including a plate and a heating element embedded in the plate. A portion of the heating element is a coiled wire, and another portion of the heating element is a non-coiled wire
Data Source
AI summary
Provided is a ceramic heater. The ceramic heater includes a disk-shaped plate and a heating element embedded in the plate. A portion of the heating element is a coiled wire, and another portion of the heating element is a non-coiled wire. The non-coiled wire is arranged in a central portion of the plate.