Ceramic Stage RF Electrode Edge Plasma Control

The patent applies local quality by making the radio-frequency electrode extend only in specific regions (first region and second region) rather than uniformly across the entire substrate. The electrode has different configurations in different areas: it extends toward the edge in the first region and has reduced extension or different orientation in the second region, creating localized electric fields that generate plasma only where needed at the substrate edge while avoiding unwanted plasma generation in other areas.

The patent resolves the contradiction by transitioning from a two-dimensional planar electrode configuration to a three-dimensional structure where the radio-frequency electrode extends vertically from the substrate surface toward the edge. This dimensional change allows the electrode to generate plasma effectively at the edge while the insulating substrate body provides protection from direct plasma exposure, maintaining both processing efficiency and electrode durability.

The patent applies segmentation by dividing the radio-frequency electrode into multiple distinct regions (first region and second region) with different configurations. The electrode is segmented such that the first region extends toward the substrate edge to concentrate electric field for plasma generation, while the second region has reduced extension or different orientation to avoid unwanted plasma. This segmented approach achieves effective plasma generation with a relatively simple integrated electrode structure rather than requiring multiple separate electrodes.