Ceramic Susceptor RF Rod Coating for Low-Impedance Plasma
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Solution Overview
Problem
Conventional ceramic susceptors face issues with impedance increase due to the use of ferromagnetic materials like nickel (Ni) for radio-frequency rods, leading to reduced plasma efficiency, non-uniform thin film deposition, and decreased durability due to thermal shock and arc generation.
Innovation Solution
A ceramic susceptor with a rod structure using Mo, W, or their alloys as base materials, coated with a metal nitride film such as AlCrN, and optionally a CrN underlayer, to prevent oxidation and reduce impedance, ensuring efficient radio-frequency transmission and enhanced durability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If ferromagnetic materials like nickel (Ni) are used for radio-frequency rods, then electrical conductivity is improved, but impedance increases due to skin effect
Solution Approach 1:
The patent uses a composite structure consisting of a Ni-based alloy core material combined with a non-ferromagnetic coating layer (such as Cu, Ag, Au, or their alloys). This composite structure allows the ferromagnetic core to provide electrical conductivity while the non-ferromagnetic coating reduces the skin effect and impedance at high radio frequencies, resolving the contradiction between conductivity and impedance.
2Power
If nickel (Ni) material is used for electrode rods, then power transmission capability is improved, but oxidation resistance deteriorates in high-temperature environments
Solution Approach 1:
The patent combines a Ni-based alloy core material with an oxidation-resistant coating layer. The core material provides excellent power transmission capability while the coating layer (such as Cu, Ag, Au or their alloys) forms a protective barrier against oxidation in high-temperature environments, thus resolving the contradiction between power transmission and oxidation resistance.
3Power
If high-power radio-frequency waves are applied for plasma generation, then plasma characteristics are improved, but thermal shock resistance deteriorates
Solution Approach 1:
The patent uses a composite structure where the Ni-based alloy core provides high power transmission for plasma generation while the non-ferromagnetic coating layer has superior thermal stability and resistance to thermal shock. This composite design allows the system to handle high-power radio-frequency waves without suffering from thermal shock damage.
4Reliability
If ferromagnetic materials are used for radio-frequency rods, then electrical connection is improved, but arc generation increases
Solution Approach 1:
The patent employs a composite structure with a Ni-based alloy core that ensures good electrical connection and a non-ferromagnetic coating layer that reduces arc generation. The coating layer's low magnetic permeability and high electrical conductivity prevent arc formation at the rod surface, while the core maintains excellent electrical connection properties.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed solution effectively reduces impedance and prevents oxidation, leading to improved plasma efficiency, uniform thin film deposition, and increased durability of the ceramic susceptor, thereby enhancing the yield of semiconductor devices.
Implementation Method 1
a gap between the support 20 and the bottom rod 32 and a gap between the support 20 and the ceramic plate 10 make routes, through which oxygen can permeate in high-temperature environments, thereby oxidizing a brazing filler formed in the interface between the connector 12 as an electrode base material and the bottom rod 32
Implementation Method 2
a ceramic susceptor is disposed to support a glass substrate, flexible substrate, or semiconductor wafer substrate and generate a radio-frequency signal for producing heat or generating plasma
Data Source
AI summary
Provided is a ceramic susceptor, which includes a ceramic plate with a radio-frequency electrode disposed therein, wherein the ceramic plate includes a connector connected to the radio-frequency electrode, the ceramic susceptor includes a rod having one end connected to the connector to supply power to the radio-frequency electrode, and the rod employs Mo, W, or an alloy thereof as a base material and includes a metal nitride film containing Cr on the surface of the base material.