CFET Memory Array Fly Word Lines for Faster Edge Access

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Solution Overview

Problem

Existing integrated circuit (IC) devices face challenges in reducing word line loading and timing delays due to increased resistance and capacitance, particularly when accessing memory cells at the edges of the memory array, which limits access speed.

Innovation Solution

Implementing a fly word line configuration using both front side and back side word lines, where one word line 'flies over' the memory cells without electrical coupling, and the other is physically shorter, reducing capacitance and resistance, thereby improving access speed and reducing word line loading.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If traditional word line configuration is used to access memory cells, then the memory array can be accessed, but timing delays and word line loading increase due to increased resistance and capacitance, limiting access speed

Engineering Contradiction:
Improveaccess speedVSAvoidtiming delays
Core Design Contradiction:
SpeedVSLoss of time

Solution Approach 1:

The word line configuration is segmented into two distinct types: fly word lines that extend over memory cells without electrical coupling, and short word lines that are physically shorter and reduce capacitance. This segmentation allows different portions of the memory array to be accessed through optimized paths, reducing overall timing delays and improving access speed.

Inventive Principle:
Principle #1Segmentation

2Area of stationary object

If word line length is increased to cover more memory cells, then more memory cells can be accessed, but resistance and capacitance increase, worsening timing delays

Engineering Contradiction:
Improvememory array coverageVSAvoidtiming performance
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

Fly word lines act as intermediaries that extend over memory cells without forming direct electrical connections. This allows the word line structure to cover a larger memory array area while avoiding the harmful effects of increased capacitance and resistance that would normally accompany longer word lines, thus maintaining timing performance.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of operation

If multi-layer word lines are implemented to reduce loading, then word line loading can be reduced, but manufacturing complexity increases

Engineering Contradiction:
Improveword line loadingVSAvoidmanufacturing process
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

Instead of using multi-layer word line structures to reduce loading, the invention inverts the approach by using fly word lines that extend over memory cells without electrical coupling. This single-layer approach achieves reduced word line loading while avoiding the manufacturing complexity of multi-layer structures.

Inventive Principle:
Principle #13The other way round (Inversion)

Data Source

PatentUS12581635B2Integrated circuit device and method
Publication Date: 2026.03.17 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12581635B2 patent drawing
  • US12581635B2 patent drawing
  • US12581635B2 patent drawing

AI summary

An integrated circuit (IC) device includes a memory array including a plurality of memory cells, a first word line over the memory array and electrically coupled to at least one first memory cell among the plurality of memory cells, and a second word line under the memory array and electrically coupled to at least one second memory cell among the plurality of memory cells. Each memory cell among the plurality of memory cells includes complementary field-effect transistor (CFET) devices.