Chamber Door Assembly with Insertion Unit for Substrate Sealing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional substrate treatment systems fail to completely seal the treatment space from the outside, even when the entrance is closed, due to gaps between the chamber and the liner, which can lead to inefficiencies in processes like etching and deposition.
Innovation Solution
An apparatus and method that utilize a door assembly with a door unit and an insertion unit to simultaneously open and close the entrance of the chamber and the opening of the liner, ensuring complete sealing through alignment and contact between the door and the liner, with a conductive gasket for grounding and an insulated film to prevent corrosion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a door assembly is provided to open/close the entrance, then the chamber can be isolated from the outside, but the treatment space is not completely sealed due to gaps between the chamber and the liner
Solution Approach 1:
The door is divided into two functional segments: a door unit for closing the chamber entrance and an insertion unit for sealing the liner opening. This segmentation allows each part to perform its specific sealing function independently, achieving complete sealing without requiring a completely redesigned complex door structure.
Solution Approach 2:
The insertion unit acts as an intermediary element that bridges the gap between the door unit and the liner opening. It extends from the door unit into the liner opening to provide the necessary seal, functioning as a mediator that connects the door mechanism to the liner sealing requirement.
2Reliability
If the entrance is closed by the door assembly, then the chamber can be isolated, but heat transfer and grounding continuity across the liner is disrupted
Solution Approach 1:
The insertion unit serves as a thermal and electrical conduit that maintains continuity across the liner while the door provides sealing. It acts as an intermediary that allows heat and electrical ground to pass through while the door unit blocks external contamination, resolving the conflict between sealing and continuity requirements.
Solution Approach 2:
The door assembly combines different material properties: the door unit provides sealing against contamination, while the insertion unit provides thermal and electrical conductivity. This composite structure integrates materials with different properties to simultaneously achieve sealing and continuity functions.
3Reliability
If the door is designed to simultaneously close the chamber entrance and liner opening, then complete sealing is achieved, but the door structure becomes more complex
Solution Approach 1:
The door unit and insertion unit are merged into a single integrated door assembly that performs both sealing functions simultaneously. By combining these functions into one assembly rather than separate mechanisms, the overall system complexity is reduced while maintaining complete sealing effectiveness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively seals the treatment space, allowing for uniform heat transfer and grounding, thereby enhancing the integrity of plasma-based substrate treatment processes by preventing external contamination and ensuring consistent process conditions.
Implementation Method 1
a plasma source to produce plasma from the process gas
Implementation Method 2
the heating member may be provided to extend from the door unit to the insertion unit
Implementation Method 3
the bonding member may include a conductive gasket
Data Source
AI summary
Disclosed is An apparatus for treating a substrate includes a chamber having a treatment space provided therein to treat the substrate and having an entrance for introducing or withdrawing the substrate, a liner disposed in the treatment space, disposed adjacent to an inner sidewall of the chamber, and having an opening formed at a position of facing the entrance to introduce or withdraw the substrate, a supporting unit to support the substrate in the treatment space, a gas supplying unit to supply process gas to the treatment space, a plasma source to produce plasma from the process gas, and a door assembly to open or close the entrance. The door assembly includes a door which includes a door unit provided outside the chamber to be movable between an opening position to open the entrance and a closing position to close the entrance, and an insertion unit extending from the door unit toward the treatment space and inserted into the opening of the liner at the closing position, and a door driving unit to drive the door.