Charge-Transfer Image Sensor Double Gate Implantation

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Solution Overview

Problem

Existing CMOS image sensor technologies face challenges in producing linear scrolling sensors with charge integration due to complexity and control signal complexity, making it difficult to achieve efficient charge transfer and summation.

Innovation Solution

A charge transfer image sensor with N adjacent lines of pixels, utilizing a single polycrystalline silicon gate level with unique doping configurations for directional charge transfer, where the polysilicon gate has p-type conductivity on one side and n-type conductivity on the other, brought to the same potential, allowing for efficient charge transfer between pixels using only two control phases.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a single polycrystalline silicon gate level is used with unique doping configuration, then manufacturing complexity is reduced, but achieving directional charge transfer becomes difficult

Engineering Contradiction:
Improvemanufacturing process simplicityVSAvoidcontrol signal complexity
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The gate is divided into two regions with different doping types (p-type and n-type) along its length. This local differentiation creates asymmetric potential barriers that enable directional charge transfer despite using a single gate level, resolving the contradiction between manufacturing simplicity and functional capability

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

By implementing asymmetric doping profiles in the gate regions, the patent creates unequal potential barriers that prevent charge backflow. This asymmetry allows directional charge transfer to be achieved without requiring multiple gate levels or complex control signals, thus maintaining manufacturing simplicity while enabling the required functionality

Inventive Principle:
Principle #4Asymmetry

2Productivity

If conventional CCD technology with overlapping polycrystalline silicon gates is used, then charge transfer efficiency is improved, but power consumption and supply voltage requirements increase

Engineering Contradiction:
Improvecharge transfer efficiencyVSAvoidpower consumption
Core Design Contradiction:
ProductivityVSUse of energy by moving object

Solution Approach 1:

The patent extracts the essential function of charge transfer from the complex multi-gate CCD structure and implements it using a simplified single-gate architecture with differential doping. This removes the need for high supply voltages and complex overlapping gate structures while maintaining effective charge transfer, thus reducing power consumption

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes the doping parameters of the gate (introducing p-type and n-type regions) to create the necessary potential barriers for charge transfer. This parameter modification allows the system to achieve efficient charge transfer at lower voltages compared to conventional CCD technology, thereby reducing power consumption

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If CMOS active pixel sensors with switched capacitors are used for charge integration, then manufacturing simplicity is improved, but charge transfer losses and noise increase

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidcharge transfer accuracy
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent replaces the switched capacitor mechanism (electrical system) with a field-based charge transfer mechanism using doped gate regions. This substitution eliminates the need for complex switching operations and charge redistribution through capacitors, thereby reducing transfer losses and noise while maintaining manufacturing simplicity

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution simplifies the manufacturing process and ensures directional charge transfer over the entire column without increased complexity, enabling effective scrolling and integration of charges while reducing noise and power consumption.

Implementation Method 1

the gate has two types of doping which are a first type of p-type conductivity on a part of the width LG, on the side where the gate is adjacent to the photodiode of the pixel and a second type of n-type conductivity on another part of the width LG

Methodology Applied
Scientific EffectCharge transfer: Photoelectric Effect

Implementation Method 2

adjacent pixels of a column each comprising a photodiode of width LP diffused in an active semiconductor layer

Methodology Applied
Scientific EffectPhotogeneration of charges: Photoelectric Effect

Data Source

PatentEP3304597B1Charge-transfer image sensor having double gate implantation
Publication Date: 2019.07.10 TELEDYNE E2V SEMICON SAS
  • EP3304597B1 patent drawingFigure 1~3
  • EP3304597B1 patent drawingFigure 4~5
  • EP3304597B1 patent drawingFigure 6~6D

AI summary

The invention relates to TDI image sensors. In order to ensure the directionality of the charge transfer in columns from pixel to pixel, it is provided for the adjacent pixels of one column to each include a photodiode (ΡΗi) having a width LP, and a storage gate (Gi) having a width LG and being made of doped polycrystalline silicon, adjacent to the photodiode of the pixel and adjacent to the photodiode (PHi+1) of a subsequent pixel of the column. The configuration of the doping of the active layer is unique over the entire width LP of the photodiode; the configuration of the doping of the active layer is unique over the entire width LG of the gate, and the polycrystalline silicon gate comprises two types of doping which are p++ doping over a portion of the width LG, on the side on which the gate is adjacent to the photodiode of the pixel and n++ doping on another portion of the width LG, on the side adjacent to the photodiode of the subsequent pixel. This gate doping difference activates a potential step in the active layer which ensures the directionality of the transfer.