Charged Particle Beam Device Modular Segmentation

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Solution Overview

Problem

Conventional charged particle beam apparatuses are large and cumbersome, requiring significant installation space and time-consuming transportation, which limits their mobility and convenience for on-site sample observation.

Innovation Solution

A modular design where a main body unit with functional components is detachably mounted on an auxiliary unit with a power supply, allowing for miniaturization and easy transportation while maintaining performance, with features like vibration control and heat management to prevent temperature rise and external vibrations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If the charged particle beam apparatus is miniaturized to reduce installation space and improve portability, then the apparatus size and installation area are reduced, but the performance and stability of the charged particle beam may deteriorate

Engineering Contradiction:
Improveapparatus sizeVSAvoidbeam stability
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The apparatus is divided into a main body unit containing the charged particle beam source and optical system, and a separate auxiliary unit containing the power supply. This segmentation allows the sensitive beam generation components to be miniaturized while the power supply can be optimized independently, resolving the contradiction between small size and stable operation.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A detachable mounting structure serves as an intermediary between the main body unit and auxiliary unit, enabling easy assembly and disassembly. This mediator allows the apparatus to be transported in a compact state while maintaining stable operation when assembled, addressing both portability and performance requirements.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of operation

If the apparatus is designed for easy transportation by separating main body and auxiliary units, then portability is improved, but the complexity of assembly and disassembly increases

Engineering Contradiction:
ImproveportabilityVSAvoidassembly complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The apparatus is segmented into modular main body and auxiliary units that can be independently handled during transportation. This segmentation improves portability while the standardized interface design minimizes assembly complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The mounting structure between main body and auxiliary units is designed to be dynamically adjustable, allowing for easy alignment and secure attachment. This dynamic design simplifies the assembly process despite the separated configuration.

Inventive Principle:
Principle #15Dynamics

3Ease of operation

If the main body unit is detachably mounted on the auxiliary unit, then the apparatus can be easily assembled and disassembled for transportation, but the connection stability between units may be compromised

Engineering Contradiction:
Improveassembly easeVSAvoidconnection stability
Core Design Contradiction:
Ease of operationVSStability of the object's composition

Solution Approach 1:

The detachable mounting structure creates separate but interoperable units, allowing easy assembly and disassembly while maintaining stable operation when connected. The segmentation enables simplified assembly procedures without compromising operational stability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The mounting interface incorporates curved or rounded features that facilitate easy alignment and attachment between units, simplifying assembly while ensuring stable connection during operation.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Data Source

PatentUS10008361B2Charged particle beam device and installation method
Publication Date: 2018.06.26 HITACHI HIGH TECH CORP
  • US10008361B2 patent drawing
  • US10008361B2 patent drawing
  • US10008361B2 patent drawing

AI summary

Provided is a charged particle beam device that is small, high performance, and easy to transport. A charged particle beam device (100) is provided with a detachable body unit (15) and an auxiliary unit (14), the body unit (15) housing a functional unit related to charged particle beams, and the auxiliary unit (14) housing a power source unit (9).