Charged Particle Beam Drawing Apparatus Data Segmentation
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Solution Overview
Problem
The existing charged particle beam drawing apparatuses face inefficiencies in process efficiency due to the need to regenerate entire graphic information files when attribute information changes, and the duplication of graphic information for chips with the same graphic but different attribute information, leading to increased data volume and processing time.
Innovation Solution
A charged particle beam drawing apparatus that separates graphic and attribute information into distinct files, allowing for independent generation and modification of attribute information, reducing the need to regenerate entire graphic information files and enabling efficient handling of chips with different attribute information using the same graphic information.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If attribute information is included together with graphic information in the graphic information file, then data compatibility is maintained, but process efficiency deteriorates due to the need to regenerate the entire graphic information file when attribute information changes
Solution Approach 1:
The patent segments the previously unified graphic information file into two separate files: a graphic information file storing only graphic data and an attribute information file storing attribute data. This segmentation allows independent modification of attribute information without affecting graphic information, thereby improving process efficiency while maintaining data compatibility through established file formats.
Solution Approach 2:
The patent extracts attribute information from the graphic information file and stores it in a separate attribute information file. This extraction enables independent handling of attribute data, allowing changes to attributes without regenerating the entire graphic information file, thus resolving the contradiction between data compatibility and process efficiency.
2Manufacturing precision
If attribute information is given to all figures to achieve higher resolution, then manufacturing precision is improved, but data volume increases and process efficiency deteriorates
Solution Approach 1:
The patent enables multiple chips with the same graphic information but different attribute information to share a single graphic information file. The attribute information file contains attribute data for multiple chips, allowing the system to copy and reuse graphic information across multiple chips while maintaining distinct attribute information for each, thereby improving manufacturing precision without proportionally increasing data volume or processing time.
3Adaptability or versatility
If the same graphic information is generated by duplication for chips with different attribute information, then adaptability is improved, but data volume increases and process efficiency deteriorates
Solution Approach 1:
The patent creates a universal graphic information file that can be shared by multiple chips with different attribute information. The separate attribute information file provides the specific variations needed for each chip, allowing the same graphic information to serve multiple purposes across different chip configurations. This universality improves adaptability while avoiding redundant data storage and processing.
Data Source
AI summary
A charged particle beam drawing apparatus of an embodiment includes: a graphic information file for storing graphic information for each of elements (for example, patterns) at a level underlying an element (for example, a cell) at a particular level in hierarchically-structured drawing data which has elements at each level; and an attribute information file for storing attribute information to be given to each of the elements at the underlying level in association with information (for example, an index number) on the element at the particular level.