Charged Particle Beam Generation Using Repeller-Isolator Configuration

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Solution Overview

Problem

Existing charged particle beam generators require accelerators or ion lenses to direct charged particles precisely, which can be bulky and complex, limiting their compactness and efficiency.

Innovation Solution

A charged particle beam generation apparatus that uses a hot-cathode filament and a repeller-isolator configuration to generate and collimate charged particles without the need for accelerators or ion lenses, employing a voltage difference between the repeller and isolator to direct particles, thereby simplifying the design and enhancing precision.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If accelerators or ion lenses are used to direct charged particles precisely, then beam precision is improved, but device complexity and size increase

Engineering Contradiction:
Improvebeam precisionVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent extracts and eliminates the accelerator and ion lens components from the traditional charged particle beam generation system. By using a hot-cathode filament that directly emits electrons and a repeller plate that simply repels them, the system achieves beam direction without requiring the complex accelerator or ion lens components, thus reducing device complexity while maintaining beam precision

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

Instead of using positive ion acceleration through complex accelerator structures, the patent inverts the approach by using electron emission from a hot cathode and electron repulsion from a negatively biased repeller plate. This inverted methodology achieves the same beam direction function with simpler components

Inventive Principle:
Principle #13The other way round (Inversion)

2Measurement precision

If accelerators or ion lenses are used to direct charged particles, then beam direction control is improved, but device volume increases

Engineering Contradiction:
Improvebeam direction controlVSAvoiddevice volume
Core Design Contradiction:
Measurement precisionVSVolume of stationary object

Solution Approach 1:

The patent removes the bulky accelerator and ion lens components from the system, replacing them with a compact hot-cathode filament and repeller plate configuration that achieves the same beam direction control in a much smaller volume

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent combines the functions of electron emission and beam direction control into a single compact configuration where the hot-cathode filament emits electrons and the repeller plate simultaneously directs them, eliminating the need for separate accelerator and lens components

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for a compact, efficient, and precise generation of charged particle beams, eliminating the need for bulky accelerator or ion lens components and reducing complexity, while maintaining control over energy and emission rates.

Implementation Method 1

A charged particle beam generation apparatus utilizes a hot-cathode filament and repeller-isolator configuration to generate and collimate charged particles

Methodology Applied
Scientific EffectThermionic emission: Thermionic Emission

Implementation Method 2

employing a voltage difference between the repeller and isolator to direct particles

Methodology Applied
Scientific EffectElectrostatic force: Electrostatics

Data Source

PatentUS20230178326A1Charged particle beam generation
Publication Date: 2023.06.08 MICROCHIP TECHNOLOGY INC
  • US20230178326A1 patent drawing
  • US20230178326A1 patent drawing
  • US20230178326A1 patent drawing

AI summary

One or more examples relate, generally, to an apparatus. The apparatus includes a charged particle source and a charged particle pointer. The charged particle pointer urges charged particles emitted by the charged particle source in a predetermined direction. The charged particle pointer comprises a repeller, and an isolator positioned along a path extending from the repeller in the predetermined direction.