Charged Particle Platform With Bellow Vibration Isolation
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Solution Overview
Problem
Current charged particle apparatus platforms for both single and multi-beam systems are complex, costly, and have a large footprint, with multi-beam platforms being particularly expensive and complicated due to the need for advanced vibration isolation and high performance requirements.
Innovation Solution
A new platform design featuring a base frame, a chamber, and a flexible bellow that isolates the metrology frame from vibrations, allowing for a substantial vacuum and reducing the complexity and cost while maintaining vibration isolation performance, using a flexible material for the bellow to connect the chamber to the metrology frame and supporting a charged particle beam generator.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a multi-beam charged particle apparatus platform is designed to meet high performance requirements, then vibration isolation performance is improved, but device complexity and cost increase significantly
Solution Approach 1:
The platform is divided into separate functional modules: a base frame supporting a chamber, and a metrology frame supporting the charged particle beam generator. These frames are connected via a bellow that provides vibration isolation while maintaining vacuum integrity. This modular segmentation allows each component to be optimized independently, reducing overall system complexity while maintaining high vibration isolation performance.
Solution Approach 2:
A flexible bellow is introduced as an intermediary element between the base frame and metrology frame. This bellow serves dual functions: maintaining vacuum sealing while providing mechanical vibration isolation. The bellow acts as a mediator that decouples the two frames mechanically while preserving the vacuum environment, thereby achieving vibration isolation without requiring complex active control systems.
2Measurement precision
If a multi-beam charged particle apparatus platform is designed with advanced vibration isolation, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The platform structure is segmented into a base frame for heavy components and a separate metrology frame for the beam generator. This segmentation allows the metrology frame to be isolated from vibrations generated by vacuum pumps and other equipment on the base frame, thereby improving beam positioning precision without requiring the entire platform to be overly complex.
Solution Approach 2:
A flexible bellow is used to connect the base frame and metrology frame. This flexible element provides passive vibration isolation through its inherent compliance, reducing transmission of mechanical vibrations to the sensitive beam positioning system. The bellow maintains vacuum sealing while allowing relative motion between frames, achieving precision improvement without active control complexity.
3Device complexity
If a new platform design is implemented for charged particle apparatus, then device complexity is reduced, but vacuum sealing capability may worsen
Solution Approach 1:
The flexible bellow serves as an intermediary element that maintains vacuum sealing between the base frame and metrology frame. Despite its flexibility for vibration isolation, the bellow is designed to be substantially airtight, preserving vacuum integrity while enabling the simplified modular platform architecture.
Solution Approach 2:
The bellow is constructed as a flexible yet airtight component that connects the two frames. Its flexible nature allows vibration isolation through relative frame motion, while its airtight construction maintains vacuum sealing. This single component simultaneously addresses both requirements without compromising either vibration isolation or vacuum integrity.
4Reliability
If a flexible bellow is used to connect chamber and metrology frame, then vibration isolation is improved, but device complexity increases
Solution Approach 1:
The flexible bellow is designed to perform multiple functions simultaneously: it provides vacuum sealing, enables relative motion between frames for vibration isolation, and maintains structural integrity. This multi-functionality reduces the need for additional separate components, thereby simplifying the overall connection structure despite the sophisticated requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The new platform simplifies the design, reduces costs, and maintains high vibration isolation performance, making it suitable for both single and multi-beam charged particle apparatuses with a smaller footprint, improving throughput and reducing operational complexity.
Implementation Method 1
the bellow comprises a flexible material such that the metrology frame is substantially isolated from any vibrations that are generated in the chamber
Implementation Method 2
the bellow is air tight so that a substantial vacuum may be established in the chamber
Data Source
AI summary
Disclosed herein is a platform for a charged particle apparatus, the platform comprising: a base frame; a chamber arranged to comprise a substrate; a metrology frame arranged to support a charged particle beam generator for irradiating a substrate in the chamber with a charged particle beam; and a bellow arranged between the metrology frame and the chamber; wherein: the chamber is rigidly connected to the base frame; the bellow comprises a flexible material such that the metrology frame is substantially isolated from any vibrations that are generated in the chamber; and the bellow is air tight so that a substantial vacuum may be established in the chamber.