Multi-Stage Chemical Liquid Filtration for Defect Inhibition
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Solution Overview
Problem
Existing filtering devices fail to achieve sufficient defect inhibition performance in chemical liquids used for semiconductor manufacturing, particularly in purifying solutions like resist solutions and CMP sluries, due to inadequate impurity removal.
Innovation Solution
A filtering device with a series arrangement of filters, including a porous ultra-high-molecular-weight polyethylene membrane with a resin layer containing neutral or ion exchange groups, and additional filters with specific pore sizes and materials, configured to enhance defect inhibition performance through sequential filtration and potential return flow paths.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a single filter is used to purify chemical liquid, then the device complexity is low, but the defect inhibition performance is insufficient
Solution Approach 1:
The filtering device is divided into multiple filters (first filter, second filter, third filter) arranged in series, each with specific pore sizes and functional characteristics. This segmentation allows each filter to target different types of impurities, achieving comprehensive purification and defect inhibition that a single filter cannot provide.
Solution Approach 2:
The invention uses composite filtering structures combining filters with different pore sizes (e.g., 100 nm, 10 nm, 1 nm) and different materials (including ultra-high-molecular-weight polyethylene and resins with neutral or ion exchange groups). This composite approach enables the system to remove diverse impurities effectively.
2Reliability
If multiple filters are arranged in series to improve purification, then the defect inhibition performance increases, but the device complexity increases
Solution Approach 1:
The filtering system is segmented into three distinct filters with progressively smaller pore sizes, creating a staged purification process. This segmentation strategy systematically addresses different impurity size ranges while maintaining a manageable device structure through functional specialization of each filter stage.
Solution Approach 2:
Each filter in the series is designed with specific local qualities - different pore sizes and material compositions - optimized for removing particular types of impurities. The first filter handles larger particles, the second filter captures medium-sized impurities, and the third filter removes fine particles, creating a tailored purification pathway.
3Reliability
If filters with smaller pore sizes are used to remove finer impurities, then the purification effectiveness improves, but the flow resistance increases
Solution Approach 1:
The filtration process is segmented into three stages with progressively smaller pore sizes. By distributing the filtration burden across multiple filters rather than using a single fine-pore filter, the system achieves high purification effectiveness while maintaining acceptable flow rates, as each filter only needs to handle a portion of the total impurity load.
Solution Approach 2:
The first and second filters perform preliminary removal of larger impurities before the liquid reaches the third filter with the smallest pore size (1 nm). This preliminary action protects the fine-pore filter from rapid clogging, maintaining its productivity and flow rate over extended operation periods.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device effectively improves defect inhibition performance by removing impurities and particles, resulting in a chemical liquid with enhanced purity and stability for semiconductor manufacturing processes.
Implementation Method 1
a porous membrane made of ultra-high-molecular-weight polyethylene
Implementation Method 2
the resin layer includes a resin having a neutral group or an ion exchange group
Implementation Method 3
the resin layer includes a resin having a neutral group or an ion exchange group
Data Source
AI summary
A filtering device is used for obtaining a chemical liquid by purifying a liquid to be purified and includes an inlet portion, an outlet portion, a filter A, at least one filter B different from the filter A, and a flow path that includes the filter A and the filter B arranged in series and extends from the inlet portion to the outlet portion. The filter A has a porous membrane made of ultra-high-molecular-weight polyethylene and a resin layer disposed to cover at least a portion of the surface of the porous membrane, and the resin layer includes a resin having a neutral group or an ion exchange group.