Chemical Liquid Composition for Container Impurity Control
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Solution Overview
Problem
Conventional chemical liquids used in semiconductor manufacturing processes suffer from defects due to impurities, which are not adequately addressed by existing methods, particularly with the miniaturization of patterns in photolithography processes.
Innovation Solution
A chemical liquid containing specific organic components such as alkanes and alkenes with defined carbon atom ranges, along with organic solvents like decane and undecane, and a controlled Hansen solubility parameter distance, is formulated to minimize impurity mixing and suppress defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional chemical liquids are used in photolithography processes, then the manufacturing process can proceed, but defects occur due to impurity elution from storage and transfer containers
Solution Approach 1:
The patent changes the chemical parameters of the liquid by specifying precise compositional requirements: organic solvents with defined Hansen solubility parameter distances (3-20 MPa^0.5) from eicosene, and controlled content ranges of organic components (0.10-1,000,000 mass ppt). These parameter changes prevent impurity elution by creating chemical compatibility barriers between the liquid and container materials.
Solution Approach 2:
The patent introduces specific organic components as intermediary substances that mediate between the chemical liquid and container materials. These organic components act as a protective layer or chemical buffer that prevents direct harmful interactions between impurities in the liquid and the container, thereby suppressing defect generation.
2Reliability
If the chemical liquid contains specific organic components to prevent impurity elution, then defect suppressing properties improve, but the liquid composition becomes more complex
Solution Approach 1:
Rather than increasing compositional complexity, the patent uses parameter changes to achieve the desired effect. By defining specific ranges for organic component content (0.10-1,000,000 mass ppt) and Hansen solubility parameter distances (3-20 MPa^0.5), the patent simplifies the formulation process while maintaining high reliability in preventing impurity elution.
3Ease of manufacture
If conventional organic solvents are used, then the chemical liquid can be formulated, but impurities are eluted from containers during storage and transfer
Solution Approach 1:
The patent modifies the parameters of conventional organic solvents by specifying precise Hansen solubility parameter distances from eicosene (3-20 MPa^0.5) and controlled content ranges. This allows the liquid to be formulated easily using known solvents while ensuring reliability through the optimized parameter selection that prevents container-liquid interactions causing impurity elution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The chemical liquid effectively prevents the elution of impurities from storage and transfer containers, reducing defects in semiconductor manufacturing processes.
Implementation Method 1
the chemical liquid effectively prevents the elution of impurities from storage and transfer containers
Data Source
AI summary
The present invention provides a chemical liquid having excellent defect suppressing properties. The present invention further provides a chemical liquid storage body containing the chemical liquid. The chemical liquid of the present invention is a chemical liquid containing a compound other than an alkane and an alkene, and one or more organic solvents selected from the group consisting of decane and undecane, in which the chemical liquid further contains one or more organic components selected from the group consisting of alkanes having 12 to 50 carbon atoms and alkenes having 12 to 50 carbon atoms, and a content of the organic component is 0.10 to 1,000,000 mass ppt with respect to a total mass of the chemical liquid.