Chip-on-Substrate Packaging Stress Relief via Pre-Cut Substrates

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Solution Overview

Problem

The packaging of integrated circuits faces issues with warpage due to differing Coefficients of Thermal Expansion (CTEs) between device dies and package substrates, leading to irregular joints and bump cracks, which adversely affect the yield of the packaging process.

Innovation Solution

A Chip-on-Substrate package is formed by adhering a wafer-level package substrate on a carrier with a pre-cut, allowing stress release and improved bonding, using a carrier with a lower CTE than the substrate, and bonding dies onto the substrate with a molding material that encapsulates the substrate and dies, facilitating uniform process control and reliability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If organic materials are used for package substrates to enable easy lamination, then ease of manufacture is improved, but warpage occurs due to elevated temperatures during solder reflow

Engineering Contradiction:
Improveease of laminationVSAvoidwarpage
Core Design Contradiction:
Ease of manufactureVSShape

Solution Approach 1:

The patent uses a laminate substrate composed of multiple layers including organic materials and inorganic materials with different CTEs. The inorganic layer (such as glass or ceramic) has lower CTE than the organic layer, compensating for thermal expansion during reflow and reducing warpage while maintaining the lamination capability of organic materials

Inventive Principle:
Principle #40Composite materials

2Strength

If flip chip bonding is used to bond device dies onto package substrates, then bonding strength is improved, but warpage is worsened due to significantly different CTEs between silicon dies and organic substrates

Engineering Contradiction:
Improvebonding strengthVSAvoidwarpage
Core Design Contradiction:
StrengthVSShape

Solution Approach 1:

The laminate substrate combines organic and inorganic materials where the inorganic layer has CTE matched closer to silicon dies. This composite structure reduces the CTE mismatch between the die and substrate, minimizing warpage during flip chip bonding and reflow while maintaining strong bonding through the solder balls

Inventive Principle:
Principle #40Composite materials

3Reliability

If elevated temperatures are used for solder reflow to ensure proper bonding, then bonding reliability is improved, but warpage in organic substrates is worsened

Engineering Contradiction:
Improvebonding reliabilityVSAvoidwarpage
Core Design Contradiction:
ReliabilityVSShape

Solution Approach 1:

The laminate substrate includes an inorganic layer with low CTE that acts as a thermal stability anchor. During elevated temperature reflow, this layer compensates for the thermal expansion of the organic layer, allowing proper solder bonding to occur while maintaining substrate flatness and preventing warpage

Inventive Principle:
Principle #40Composite materials

4Stress or pressure

If pre-cut is performed on wafer-level package substrates before bonding, then stress release is improved, but manufacturing complexity is worsened

Engineering Contradiction:
Improvestress releaseVSAvoidmanufacturing complexity
Core Design Contradiction:
Stress or pressureVSDevice complexity

Solution Approach 1:

The wafer-level substrate is pre-cut into individual package substrates before bonding. This segmentation releases accumulated stress in the substrate and allows each package to be processed independently, improving bonding quality while the modular approach enables parallel processing that offsets the additional step

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method reduces stress and improves the reliability of the packaging process by releasing stress in the substrate before bonding, resulting in more uniform and reliable Chip-on-Substrate packages with enhanced adhesion and process control.

Implementation Method 1

since the dies and the package substrates have significantly different Coefficients of Thermal Expansion (CTEs), the warpage in the device dies and the package substrates is worsened

Methodology Applied
Scientific EffectCoefficient of Thermal Expansion (CTE): Thermal Expansion

Implementation Method 2

bonding dies onto the substrate with a molding material that encapsulates the substrate and dies

Methodology Applied
Scientific EffectEncapsulation: Physical Containment

Implementation Method 3

A Chip-on-Substrate package is formed by adhering a wafer-level package substrate on a carrier with a pre-cut

Methodology Applied
Scientific EffectAdhesion: Adhesive

Data Source

PatentUS10679951B2Chip-on-substrate packaging on carrier
Publication Date: 2020.06.09 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US10679951B2 patent drawing
  • US10679951B2 patent drawing
  • US10679951B2 patent drawing

AI summary

A method includes mounting a wafer-level package substrate over a carrier, and pre-cutting the wafer-level package substrate to form trenches extending from a top surface of the wafer-level package substrate into the wafer-level package substrate. A plurality of dies is bonded over the wafer-level package substrate. The plurality of dies is molded in a molding material to form a wafer-level package, with the wafer-level package including the wafer-level package substrate, the plurality of dies, and the molding material. The carrier is detached from the wafer-level package. The wafer-level package is sawed into a plurality of packages, with each of the plurality of packages including a portion of the wafer-level package substrate and one of the plurality of dies.