Chip Stack Impedance Matching Using Ultra-Low Loss Dielectrics

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Solution Overview

Problem

Current semiconductor chip stacks face limitations in achieving high clock speeds due to signal transmission issues caused by passive component networks with inexact performance tolerances, leading to reduced operational frequencies compared to intrinsic clock speeds of semiconductor die.

Innovation Solution

Integration of ultra-low loss, high energy density dielectric layers and high permeability magnetic materials within the chip stack to resonate at matching clock frequencies, along with impedance matching and frequency filtering networks, to minimize ringing and optimize clock speed.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If passive component networks are used for impedance matching and signal transmission, then electrical connections between semiconductor die can be established, but inexact performance tolerances cause signal degradation and reduced clock speeds

Engineering Contradiction:
Improveclock speedVSAvoidsignal integrity
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The patent extracts and removes traditional passive component networks (resistors, capacitors, inductors) from the signal transmission path. Instead, it uses direct impedance-matched transmission lines formed by ultra-low loss dielectric materials and geometric features that provide inherent impedance control without discrete passive components, eliminating tolerance accumulation and signal degradation

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes the dielectric material parameters by using ultra-low loss materials with specific permittivity values (e.g., Er=70 for titanium dioxide, Er=200-800 for perovskite electroceramics) and controls grain size below 50nm to achieve femtosecond polarization response times. These parameter changes enable high-frequency operation with minimal signal loss and maintain impedance matching across the transmission path

Inventive Principle:
Principle #35Parameter changes

2Speed

If traditional dielectric materials are used in transmission lines, then manufacturing is simplified, but signal loss increases and operational frequency is limited

Engineering Contradiction:
Improveoperational frequencyVSAvoidsignal loss
Core Design Contradiction:
SpeedVSLoss of energy

Solution Approach 1:

The patent employs composite material structures combining ultra-low loss dielectric materials (such as titanium dioxide with Er=70, or perovskite electroceramics with Er=200-800) with precisely controlled geometric features. This composite approach achieves both low signal loss and high frequency operation by integrating material properties with structural design for optimal transmission line performance

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent applies local quality by positioning specific dielectric materials with tailored permittivity values at different locations along the transmission line. Ultra-high permittivity materials (Er=200-800) are used in resonant structures and impedance matching sections, while ultra-low loss materials are used in main transmission paths, optimizing performance at each critical location

Inventive Principle:
Principle #3Local quality

3Reliability

If electromagnetic reflections occur at vias, then manufacturing is easier, but signal integrity deteriorates and ringing increases

Engineering Contradiction:
Improvesignal integrityVSAvoidvia structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies preliminary action by incorporating geometric features and impedance matching structures at via locations before signal transmission occurs. These pre-designed features control impedance transitions and minimize reflections at via interfaces, preventing signal integrity issues before they arise during operation

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent uses geometric features and dielectric structures as intermediary elements between different impedance zones at via locations. These intermediary structures provide gradual impedance transitions, mediating between the transmission line and via structures to minimize reflections and maintain signal integrity

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively extends impedance-matched electrical lengths, mitigates ringing, and brings the operational clock speed of the chip stack closer to the intrinsic clock speed of the semiconductor die, enhancing signal integrity and performance.

Implementation Method 1

ultra-low loss/high energy density dielectric materials in the form of high permeability and high permittivity dielectrics are periodically arranged along the length of said transmission line to cause it to resonate at a frequency that matches the clock speed

Methodology Applied
Scientific EffectResonance: Resonance

Implementation Method 2

geometric features comprising magnetic materials located in the vicinity of a vertical interconnect (via) to minimize electromagnetic reflections at a via

Methodology Applied
Scientific EffectElectromagnetic reflection minimization: Reflection

Implementation Method 3

high energy density dielectric layers consisting of a perovskite electroceramic with a grain size of less than 50 nm and having a relative permittivity, Er, in the range of 200≤Er≤800

Methodology Applied
Scientific EffectDielectric permittivity: Dielectric Permittivity

Implementation Method 4

high permeability magnetic materials within the chip stack to resonate at matching clock frequencies

Methodology Applied
Scientific EffectMagnetic permeability: Magnetism

Data Source

PatentUS11257762B2High speed semiconductor chip stack
Publication Date: 2022.02.22 DE ROCHEMONT L PIERRE
  • US11257762B2 patent drawing
  • US11257762B2 patent drawing
  • US11257762B2 patent drawing

AI summary

The present invention ultra-low loss high energy density dielectric layers having femtosecond (10−15 sec) polarization response times within a chip stack assembly to extend impedance-matched electrical lengths and mitigate ringing within the chip stack to bring the operational clock speed of the stacked system closer to the intrinsic clock speed(s) of the semiconductor die bonded within chip stack.