3D Circuit Formation via Chemical Plating Blocker

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Solution Overview

Problem

Existing methods for separating conductive layers on a substrate, such as mechanical trenches and photoresist materials, can cause damage and are not chemically precise, leading to a need for improved chemical separation techniques.

Innovation Solution

The method involves embedding a conductor layer in a substrate, forming a cavity, coating it with a plating blocker material, ablating the blocker to expose the conductor, and using electroless metal plating to deposit a second conductor layer while inhibiting plating on the blocker material, thereby chemically separating the conductive layers.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If mechanical trench is used to separate electrical conductors, then separation is achieved easily, but damage occurs to metal deposited close to the trench

Engineering Contradiction:
Improveease of separationVSAvoiddamage to metal
Core Design Contradiction:
Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

A plating blocker material is introduced as an intermediary substance between conductors to prevent metal deposition in unwanted areas. This mediator selectively blocks plating chemistry without requiring mechanical damage to surrounding metal, resolving the contradiction between easy separation and avoidance of metal damage.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces the mechanical trenching system with a chemical plating blocking system. Instead of using physical mechanical forces to create separation trenches, the invention uses chemical substances (plating blockers) to prevent metal deposition, thereby achieving separation without mechanical damage to adjacent metal structures.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Manufacturing precision

If photoresist material is used to separate metal deposition, then separation precision is improved, but physical application and removal processes are required

Engineering Contradiction:
Improveseparation precisionVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent replaces physical photoresist application and removal processes with a chemical plating blocking approach. The plating blocker material is applied through standard plating processes and removed chemically, eliminating the need for separate physical application and removal steps while maintaining separation precision.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention changes the fundamental parameter of separation from physical barrier (photoresist) to chemical barrier (plating blocker). This parameter change allows the separation material to be integrated into the plating process itself, reducing overall process complexity while maintaining precision.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If plating blocker material is used to prevent metal plating, then unwanted plating is prevented, but the blocker material must be removed after use

Engineering Contradiction:
Improveplating controlVSAvoidprocess efficiency
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The plating blocker material is designed to be temporarily discarded after serving its separation function. The blocker is removed after the plating process completes, allowing the underlying conductor to be accessed. This temporary use and disposal approach maintains plating control while minimizing impact on overall productivity.

Inventive Principle:
Principle #34Discarding and recovering

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for precise and damage-free separation of conductive layers, enabling even metal deposition on complex substrates and preventing unwanted plating, thus enhancing the reliability of electrical circuits.

Implementation Method 1

Electroless metal deposition uses a redox reaction to deposit a layer of metals on a substrate without passage of an electric current

Methodology Applied
Scientific EffectElectroless metal deposition: Chemical Bonding

Implementation Method 2

Electroless metal deposition uses a redox reaction to deposit a layer of metals on a substrate without passage of an electric current

Methodology Applied
Scientific EffectRedox reaction: Redox Reactions

Implementation Method 3

The catalysts facilitate initiation and subsequent deposition of electroless metals (e.g., copper, tin, etc.) from solutions of metal salts

Methodology Applied
Scientific EffectCatalysis: Catalysis

Implementation Method 4

The ablation can be performed by use of UV, CO2, YAG, excimer laser, mechanical trimmer, or other appropriate means

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Data Source

PatentUS11076492B2Three dimensional circuit formation
Publication Date: 2021.07.27 AVERATEK CORP
  • US11076492B2 patent drawing
  • US11076492B2 patent drawing
  • US11076492B2 patent drawing

AI summary

Devices, methods, and systems for forming an electrical circuit out of a conductor embedded in two layers of substrate are disclosed. Portions of the two layers of substrate and the conductor are removed, forming a cavity through the two layers and the conductor. A blocker material is deposited along the wall of the cavity. A portion of the blocker material and adjacent layer of the substrate is removed forming another cavity in contact with a part of the conductor. A surface of the second cavity is then electroless plated by a conductive metal to form part of the electrical circuit.