Circulated Cooled Target for Proton Beam Irradiation
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Solution Overview
Problem
The existing sputtering equipment fails to effectively cool the target material when exposed to a proton beam, as the cooling gas tubing does not sustain high temperatures adequately, not meeting user requirements for efficient cooling.
Innovation Solution
A circulated cooled target system comprising a first target chamber with a central hole part and flow channels, connected to a second target chamber with a communicating chamber and a carrier element, where cooling liquid and gas are filled and circulated to effectively cool the target material.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If cooling gas tubing is used to cool the target material, then the structure is simple, but the cooling effect is insufficient to sustain high temperatures from proton beam irradiation
Solution Approach 1:
The patent introduces a dual-phase cooling system using both liquid (water) and gas (helium) cooling mechanisms. The liquid cooling channel circulates water through the target chamber, while the gas cooling system introduces helium gas to enhance heat dissipation. This combination of pneumatic and hydraulic cooling methods provides sufficient cooling effect to sustain high temperatures from proton beam irradiation, while maintaining reasonable structural complexity.
2Temperature
If a dual-phase cooling system with liquid and gas circulation is implemented, then the cooling efficiency is improved, but the device complexity increases
Solution Approach 1:
The patent merges liquid cooling and gas cooling systems into a single integrated target chamber structure. The liquid cooling channel and gas cooling system share the same spatial environment and work together to cool the target material. This merging approach improves cooling efficiency by combining the high heat capacity of liquid with the high thermal conductivity of gas, while avoiding the need for completely separate cooling systems, thus controlling device complexity.
Solution Approach 2:
The target chamber structure serves multiple functions: it contains the target material, provides liquid cooling through integrated channels, and facilitates gas circulation for enhanced cooling. This multi-functionality reduces the need for additional dedicated cooling components, thereby improving cooling efficiency without proportionally increasing device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system provides enhanced cooling by circulating water and helium gas through the carrier element, effectively managing high temperatures and improving the cooling efficiency of the target material.
Implementation Method 1
a water and a helium gas are filled in from a liquid inlet and a gas inlet to fly out after circulating a concave part of a carrier element to cool down the target
Implementation Method 2
circulating water and helium gas through the carrier element
Data Source
AI summary
A liquid and a gas is constantly filled into a target chamber of a target. Then the liquid and the gas flow around the chamber and are flown out. By doing so, the target is effectively cooled down.