Clean Stocker Layout With Downflow for Reticle and Pod Storage
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing storage solutions for semiconductor reticles and their containers are prone to contamination due to wind generated by transportation devices, and they lack efficient compact storage and retrieval methods.
Innovation Solution
A clean stocker system with vertically overlapping article and container storage racks, utilizing a downflow of clean gas, and independent rotatable racks, along with dedicated transportation devices, to ensure clean storage and retrieval of articles and containers in a compact space.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If articles are stored in a conventional rack system with transportation devices moving along travel routes, then transportation and retrieval of articles is enabled, but articles may be contaminated by wind generated by the moving transportation devices
Solution Approach 1:
The patent transitions from a horizontal rack arrangement to a vertical stacking configuration where articles are stored in containers on upper racks and lower racks. This vertical dimensionality change allows the transportation device to operate in a manner that generates minimal wind impact on stored articles, while still enabling efficient retrieval and transportation through the vertical stack configuration.
Solution Approach 2:
The patent introduces a clean atmosphere system that maintains a protected environment within the rack structure. By creating a controlled atmospheric environment, the system prevents contamination of stored articles from wind generated by transportation operations, ensuring article cleanliness while maintaining operational functionality.
2Quantity of substance
If multiple racks are used to store both articles and containers, then storage capacity is increased, but the space occupied by the storage system increases
Solution Approach 1:
The patent utilizes vertical stacking to arrange containers and articles in three-dimensional space. By stacking containers vertically on different rack levels and enabling vertical movement, the system dramatically increases storage density without proportionally increasing floor space occupation, effectively transitioning from two-dimensional to three-dimensional storage utilization.
Solution Approach 2:
The patent implements a nested configuration where articles are stored inside containers, and containers are stacked vertically on racks. This nesting approach allows multiple storage levels to be compactly arranged, maximizing the use of vertical space while minimizing the horizontal footprint of the storage system.
3Reliability
If articles are stored inside containers, then protection and organization are improved, but the operational range required for transportation devices increases
Solution Approach 1:
The patent divides the storage system into distinct segments: upper racks for storing articles in containers, lower racks for storing empty containers, and a centralized opening/closing device. This segmentation allows transportation operations to be localized and efficient, reducing the operational range required while maintaining article protection through proper container storage and handling.
Solution Approach 2:
The patent introduces an opening/closing device as an intermediary mechanism between the transportation device and the stored articles. This intermediary automatically opens containers to receive articles and closes them for protection, eliminating the need for the transportation device to directly access and manipulate articles, thereby reducing the required operational range while ensuring article protection.
4Area of stationary object
If a compact vertical stacking arrangement is used, then space efficiency is improved, but the complexity of the storage and retrieval system increases
Solution Approach 1:
The patent designs the transportation device to perform multiple functions: transporting containers between storage locations, transporting articles between storage locations, and coordinating with the opening/closing device. This multi-functionality reduces the need for separate specialized devices for each operation, thereby managing system complexity while achieving compact vertical storage efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively prevents contamination, allows for efficient storage and retrieval of a large number of articles and containers in a compact space, and reduces the operational range of transportation devices, enabling efficient and clean storage even when the number of containers is fewer than the articles.
Implementation Method 1
a down flow of a clean gas is provided in the clean stocker
Data Source
AI summary
A reticle rotatable rack is provided at an upper position, and a pod rotatable rack is provided at a lower position in a clean stocker. A clean gas is supplied downwardly. In the stocker, a pod transportation device and a reticle transportation device are elevated and lowered. Load ports, a pod opener, and the pod rotatable rack are connected by the pod transportation device. The pod opener and the reticle rotatable rack are connected by the reticle transportation device.