CMOS Multi-Sensor SoC Layout for Compact Environmental Sensing

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Solution Overview

Problem

The integration of multiple sensing units, such as temperature, humidity, air pressure, and gas sensing, into a single chip is challenging due to different process technologies and the difficulty in manufacturing both digital and analog circuits on a silicon chip, leading to increased volume, cost, and power consumption in handheld devices.

Innovation Solution

A sensing system on chip (SoC) is developed using a CMOS platform, where a substrate integrates a thermometer, humidity sensing unit, air pressure sensing unit, and gas sensing unit, with each unit formed on the substrate and arranged longitudinally, utilizing common materials like capacitors and inductors, and processed through CMOS post-processing to reduce volume and cost.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If multiple sensing units are integrated into a single chip, then volume and cost are reduced, but manufacturing difficulty increases due to different process technologies

Engineering Contradiction:
Improvechip volumeVSAvoidmanufacturing difficulty
Core Design Contradiction:
Volume of moving objectVSEase of manufacture

Solution Approach 1:

The patent combines multiple sensing units (temperature, humidity, air pressure, gas sensing) into a single chip using CMOS post-processing technology. This merging approach reduces the overall volume and cost while the use of standardized CMOS processes mitigates the manufacturing difficulty by providing a unified fabrication platform for different sensing functions.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The sensing chip is designed with multi-functionality to perform temperature, humidity, air pressure, and gas sensing operations simultaneously. This universal design allows a single chip to replace multiple separate sensing units, achieving volume reduction while maintaining all required sensing capabilities through integrated CMOS-based sensing elements.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Ease of manufacture

If multiple sensing units are integrated into a single chip, then cost is reduced, but manufacturing complexity increases due to different process technologies

Engineering Contradiction:
ImprovecostVSAvoidmanufacturing complexity
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The patent merges multiple sensing units into a single chip structure, reducing the need for separate packaging and testing operations. This consolidation lowers overall manufacturing cost despite the increased device complexity, as the CMOS post-processing approach provides a standardized framework for integrating different sensing functions.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent employs CMOS post-processing to fabricate different sensing units with varying physical and chemical parameters on the same chip. By adjusting material composition, layer structures, and geometric parameters during the CMOS process, the system achieves multi-functionality while maintaining a unified manufacturing flow that controls complexity.

Inventive Principle:
Principle #35Parameter changes

3Use of energy by moving object

If multiple integrated circuits are integrated into one SoC chip, then power consumption is reduced, but manufacturing difficulty increases

Engineering Contradiction:
Improvepower consumptionVSAvoidmanufacturing difficulty
Core Design Contradiction:
Use of energy by moving objectVSEase of manufacture

Solution Approach 1:

The patent integrates multiple sensing circuits into a single CMOS chip, reducing the total power consumption by eliminating redundant packaging and interconnections. The merging of sensing functions and signal processing circuits onto one chip decreases the energy required for signal transmission and system operation, while the standardized CMOS process manages the manufacturing difficulty.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces the volume and cost of handheld devices, lowers power consumption, and enhances computing speed by integrating multiple sensing units into a single chip, improving system functionality and manufacturing ease.

Implementation Method 1

a heating unit is formed in the gas sensing unit

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS20240162098A1Sensing system on chip and the manufacturing method thereof
Publication Date: 2024.05.16 NATIONAL TSING HUA UNIVERSITY
  • US20240162098A1 patent drawing
  • US20240162098A1 patent drawing
  • US20240162098A1 patent drawing

AI summary

A sensing system on chip (SOC) is disclosed. The sensing system on chip (SOC) includes a substrate, a humidity sensing unit, an air pressure sensing unit and a gas sensing unit. The substrate has a plane. The humidity sensing unit is formed on the substrate. The air pressure sensing unit is formed on the substrate. The gas sensing unit is formed on the substrate, wherein the humidity sensing unit, the air pressure sensing unit and the gas sensing unit are all arranged on the plane.