Oxide Semiconductor Pixel Circuit for Low-Leakage Global Shutter

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Solution Overview

Problem

Conventional CMOS image sensors with global shutter systems face challenges in suppressing charge leakage, leading to image distortion and high off-state current issues, particularly when capturing fast-moving objects, due to the prolonged charge holding period and high off-state current of transistors.

Innovation Solution

The use of a semiconductor device with a pixel circuit structure that includes transistors with oxide semiconductor channels, specifically designed to minimize off-state current, allowing for simultaneous charge accumulation across all pixels and reducing charge leakage, thereby enabling image capture without distortion.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a global shutter system is adopted in a CMOS sensor to capture fast-moving objects without image distortion, then image quality is improved, but charge leakage increases due to the prolonged charge holding period

Engineering Contradiction:
Improveimage qualityVSAvoidcharge leakage
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent changes the material parameter of the transistor from conventional semiconductor to oxide semiconductor, which fundamentally alters the off-state current characteristics. This material substitution enables the transistor to maintain extremely low leakage current over the extended charge holding period required by global shutter systems, thus resolving the contradiction between image quality and charge leakage.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If the charge holding period is extended to read data sequentially from all pixels in a global shutter system, then complete image capture is achieved, but charge flows out by leakage current and original data is lost

Engineering Contradiction:
Improvedata reading completenessVSAvoidcharge data loss
Core Design Contradiction:
ProductivityVSLoss of information

Solution Approach 1:

The patent modifies the electrical parameter of the transistor by using oxide semiconductor material, which exhibits extremely low off-state current. This enables the transistor to hold charge data stable throughout the entire sequential reading process from all pixels, preventing charge data loss even during extended holding periods.

Inventive Principle:
Principle #35Parameter changes

3Device complexity

If conventional transistors are used in pixel circuits, then device complexity is reduced, but off-state current is high causing significant charge leakage

Engineering Contradiction:
Improvetransistor structure simplicityVSAvoidoff-state current control
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent changes the material composition parameter of the transistor channel from conventional silicon-based semiconductor to oxide semiconductor. This material substitution fundamentally improves the off-state current characteristic without adding structural complexity, maintaining the simple transistor design while achieving superior electrical performance.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The implementation of oxide semiconductor transistors in the CMOS image sensor significantly reduces off-state current, effectively suppressing charge leakage and allowing for clear, undistorted images of moving objects by ensuring consistent charge holding across all pixels.

Implementation Method 1

a photodiode 101, a signal charge accumulation portion 112, and a plurality of transistors 103, 104

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS20110215323A1Semiconductor device and manufacturing method thereof
Publication Date: 2011.09.08 SEMICON ENERGY LAB CO LTD
  • US20110215323A1 patent drawing
  • US20110215323A1 patent drawing
  • US20110215323A1 patent drawing

AI summary

In a CMOS image sensor in which a plurality of pixels is arranged in a matrix, a transistor in which a channel formation region includes an oxide semiconductor is used for each of a charge accumulation control transistor and a reset transistor which are in a pixel portion. After a reset operation of the signal charge accumulation portion is performed in all the pixels arranged in the matrix, a charge accumulation operation by the photodiode is performed in all the pixels, and a read operation of a signal from the pixel is performed per row. Accordingly, an image can be taken without a distortion.