Variable-Finger-Pitch CMOS Resonator for Tunable Clock Frequency
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Solution Overview
Problem
Existing CMOS-based clock circuits lack tunable frequency output due to fixed fin pitch in resonator structures, limiting their adaptability and efficiency.
Innovation Solution
A CMOS-based resonator structure utilizing FinFET transistor structures with variable finger pitch to tune resonator frequency, incorporating dielectric material in S/D regions and employing conductive fingers to form a horizontal resonator structure compatible with standard CMOS processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If fixed fin pitch resonator structures are used in CMOS clock circuits, then manufacturing simplicity is maintained, but frequency tunability is lost
Solution Approach 1:
The resonator structure transitions from static fixed fin pitch to dynamic variable finger pitch configuration, enabling frequency tuning while maintaining CMOS compatibility. The conductive fingers can be selectively activated or reconfigured to change the effective pitch, allowing the same physical structure to operate at multiple frequencies.
Solution Approach 2:
The invention changes the geometric parameter of the resonator from fixed fin pitch to variable finger pitch. By modifying the pitch parameter through different finger configurations or selective activation, the resonator frequency can be tuned without changing the underlying CMOS manufacturing process.
2Adaptability or versatility
If variable finger pitch resonator structures are implemented, then frequency tunability is achieved, but manufacturing complexity increases
Solution Approach 1:
The resonator structure serves multiple functions: it can operate at multiple frequencies using the same physical infrastructure of fins and fingers. The standard CMOS process fabricates a universal structure that can be configured for different frequencies through electrical control or selective activation, eliminating the need for separate manufacturing processes for each frequency.
Solution Approach 2:
The resonator is segmented into multiple fins and conductive fingers that can be independently controlled or activated. This segmentation allows different portions of the structure to be used for different frequency ranges, with the same manufacturing process creating all segments that can be selectively engaged.
3Adaptability or versatility
If traditional resonator structures are used, then device area is reduced, but frequency adaptability is limited
Solution Approach 1:
A single resonator structure with variable finger pitch configuration replaces what would traditionally require multiple fixed-frequency resonators. This universal structure maintains compact area while providing frequency adaptability through electrical or configurational control of the finger pitch, eliminating the need for multiple separate resonator devices.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables tunable frequency output and improved performance with reduced chip area and power consumption in clock circuits.
Implementation Method 1
A resonator structure and method for fabricating the resonator are disclosed. The resonator includes a plurality of semiconductor fins and a plurality of conductive fingers. The conductive fingers are configured to resonate at an output frequency when an input signal is applied to the conductive fingers.
Data Source
AI summary
A resonator device includes a substrate with a first number of fins extending over the substrate. The fins extend along the substrate in a first direction. A second number of conductive fingers are provided over the fins, which extend in a second direction perpendicular to the first direction. The first number is less than or equal to the second number. The conductive fingers are configured to receive an input signal such that the conductive fingers resonate at an output frequency. The conductive fingers define a finger pitch therebetween, and the output frequency is based on the finger pitch.