CMOS Image Sensor Microlens Stack for AF and Pixel Sensitivity

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Solution Overview

Problem

Solid-state imaging devices face sensitivity differences among imaging pixels due to varying microlens shapes and refractive indices, leading to degraded imaging performance and color mixing, especially when in-layer lenses are provided for focus detecting pixels.

Innovation Solution

A solid-state imaging device with a pixel array unit featuring first microlenses formed in the same layer, covered by a film with a refractive index of 1.4 to 2.0, and a second microlens with a higher refractive index formed on focus detecting pixels, acting as an etching stopper and shared between adjacent focus detecting pixels to maintain AF properties and improve sensitivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If in-layer lenses are provided for focus detecting pixels, then autofocus capability is improved, but pixel height increases and sensitivity of imaging pixels degrades

Engineering Contradiction:
Improveautofocus capabilityVSAvoidpixel height uniformity
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent introduces a vertical stacking architecture where imaging pixels and focus detecting pixels are arranged in different layers (first pixel layer and second pixel layer). This dimensional separation allows in-layer lenses to be provided only for focus detecting pixels without increasing the height of imaging pixels, thereby maintaining sensitivity while enabling autofocus capability.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If microlenses with different curvature and refractive index are formed on the same plane, then focus detecting pixel functionality is improved, but pattern discontinuities cause sensitivity differences among imaging pixels

Engineering Contradiction:
Improvefocus detecting pixel functionalityVSAvoidmicrolens shape uniformity
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent segments the pixel array into distinct regions: imaging pixels in a first pixel layer and focus detecting pixels in a second pixel layer. This segmentation allows microlenses with different characteristics to be formed for different pixel types without causing pattern discontinuities, as each pixel type has its own dedicated layer with uniform microlens formation.

Inventive Principle:
Principle #1Segmentation

3Adaptability or versatility

If all pixels are made taller to accommodate in-layer lenses, then focus detecting pixel AF properties are improved, but sensitivity of imaging pixels degrades and color mixing occurs

Engineering Contradiction:
ImproveAF propertiesVSAvoidpixel sensitivity
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent utilizes vertical layering to place focus detecting pixels with in-layer lenses in a second pixel layer above the first pixel layer containing imaging pixels. This dimensional arrangement allows the taller structure with in-layer lenses to exist only where needed for autofocus, while imaging pixels maintain their original height and sensitivity characteristics.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enhances the sensitivity of imaging pixels while preserving the autofocus capabilities of focus detecting pixels, preventing height increases and color mixing, thus improving overall image quality.

Implementation Method 1

The film may be formed as an etching stopper film that prevents etching on the first microlenses of the pixels other than the focus detecting pixel when the second microlens is formed

Methodology Applied
Scientific EffectEtching stopper:

Implementation Method 2

a second microlens formed on the film of a focus detecting pixel among the pixels

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 3

a second microlens formed on the film of a focus detecting pixel among the pixels

Methodology Applied
Scientific EffectLight focusing: Lens

Data Source

PatentUS12164116B2Solid-state imaging device, method of manufacturing the same, and electronic apparatus
Publication Date: 2024.12.10 SONY GROUP CORP
  • US12164116B2 patent drawing
  • US12164116B2 patent drawing
  • US12164116B2 patent drawing

AI summary

The present technology relates to a solid-state imaging device that can improve the sensitivity of imaging pixels while maintaining AF properties of a focus detecting pixel. The present technology also relates to a method of manufacturing the solid-state imaging device, and an electronic apparatus.The solid-state imaging device includes: a pixel array unit including pixels; first microlenses formed in the respective pixels; a film formed to cover the first microlenses of the respective pixels; and a second microlens formed on the film of the focus detecting pixel among the pixels. The present technology can be applied to CMOS image sensors, for example.