CMOS Image Sensor Encapsulation Using Transparent Substrate Support

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Solution Overview

Problem

Conventional CMOS image sensors have thick encapsulation structures, which hinder the manufacturing of thinner versions with improved mechanical support and cleanliness during the process.

Innovation Solution

A method involving the formation of a blind hole in a combined layer with a micro convex lens, filling with conductive material, and using a transparent substrate for mechanical support during grinding to achieve a thin CMOS image sensor encapsulation structure, where the transparent substrate material is fixed with a high-light-transmittance adhesive and a dummy wafer is used to facilitate wafer thinning.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Length of moving object

If conventional encapsulation structures are used, then the structure provides sufficient mechanical support, but the thickness is relatively large

Engineering Contradiction:
Improveencapsulation structure thicknessVSAvoidmechanical support
Core Design Contradiction:
Length of moving objectVSStrength

Solution Approach 1:

The encapsulation structure is divided into multiple functional layers: a first insulating layer with blind holes for electrical connections, a transparent substrate layer for mechanical support and light transmission, and a second insulating layer for protection. This segmentation allows each layer to be optimized independently, achieving thin overall thickness while maintaining mechanical strength through the transparent substrate.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The transparent substrate material is selectively positioned to cover specific regions where mechanical support is most needed, while allowing other regions to be thinner. The blind holes are strategically located to provide electrical connections only where required, enabling local optimization of both thickness and mechanical support properties.

Inventive Principle:
Principle #3Local quality

2Length of moving object

If wafer thinning is performed, then the encapsulation structure thickness is reduced, but the manufacturing process becomes more complex

Engineering Contradiction:
Improveencapsulation structure thicknessVSAvoidmanufacturing process complexity
Core Design Contradiction:
Length of moving objectVSDevice complexity

Solution Approach 1:

The blind holes are formed in the first insulating layer before the wafer thinning process. This preliminary action allows the electrical connection structure to be established while the wafer is still thick and easier to handle, simplifying the overall manufacturing process by avoiding the complexity of forming blind holes in a already-thinned structure.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

Instead of thinning the wafer first and then forming the encapsulation structure, the invention forms the encapsulation structure components (blind holes, insulating layers) on the thick wafer first, then performs thinning. This inverted sequence simplifies the manufacturing process by avoiding delicate operations on thin structures.

Inventive Principle:
Principle #13The other way round (Inversion)

3Illumination intensity

If the encapsulation structure is made thinner, then the light transmittance is improved, but the mechanical support is reduced

Engineering Contradiction:
Improvelight transmittanceVSAvoidmechanical support
Core Design Contradiction:
Illumination intensityVSStrength

Solution Approach 1:

The encapsulation structure uses composite materials, particularly the transparent substrate material that combines high light transmittance properties with adequate mechanical strength. This composite approach allows the structure to be thin for good light transmission while the transparent substrate provides the necessary mechanical support.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The transparent substrate is positioned strategically to provide mechanical support only in regions where it is most needed for structural integrity, while allowing other regions to be thinner to maximize light transmittance. This local optimization resolves the contradiction between thickness and mechanical support.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method results in a thin CMOS image sensor encapsulation structure with enhanced mechanical support and higher cleanliness, allowing the wafer to be thinned to 20-100µm thickness while maintaining reliability and light transmittance.

Implementation Method 1

the transparent substrate material provides more mechanical support forces for the wafer, such that the wafer can become thinner by grinding

Methodology Applied
Scientific EffectMechanical support: Mechanical Force

Implementation Method 2

The transparent substrate material is fixed on surfaces of the first insulating layer and the micro convex lenses by a high-light-transmittance adhesive glue

Methodology Applied
Scientific EffectAdhesion: Adhesive

Implementation Method 3

A surface of the first insulating layer facing away from the wafer has a micro convex lens

Methodology Applied
Scientific EffectLight focusing: Lens

Implementation Method 4

filling an electrically conductive material in the blind hole having the second insulating layer, and making a conductor (wire) in the combined layer extend to a surface of the first insulating layer to be electrically connected to the electrically conductive material

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentEP3503191B1CMOS image sensor encapsulation structure and method for manufacturing the same
Publication Date: 2021.03.24 PIONEER MATERIALS INC CHENGDU
  • EP3503191B1 patent drawingFigure 1~2B
  • EP3503191B1 patent drawingFigure 3A~4B
  • EP3503191B1 patent drawingFigure 4C~5B

AI summary

The present disclosure provides a CMOS image sensor encapsulation structure and a method for manufacturing the same, belonging to the technical field of image sensors. In steps of the method for manufacturing a CMOS image sensor encapsulation structure of the present disclosure, firstly, a transparent substrate material is fixed to a surface of a first insulating layer having a micro convex lens, a dummy wafer is fixed on a surface of the transparent substrate material, and then a wafer is thinned by grinding, and in this process, the transparent substrate material provides more mechanical support force for the wafer, therefore, the wafer can become thinner by grinding, thus the CMOS image sensor encapsulation structure is characterized by being formed in a thin shape. Besides, a second installation area has a protection glue layer which can prevent oxygen and moisture from entering internal elements and absorb scattered light, thus the whole CMOS image sensor encapsulation structure has a longer service life and better use effects. Moreover, in the manufacture process, the transparent substrate material is manufactured in a semiconductor factory, thus the cleanliness is higher, and pollution to the CMOS image sensor encapsulation structure can be avoided.