Load Cup Nebulizer Jets for CMP Edge and Gap Cleaning
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Solution Overview
Problem
Chemical mechanical polishing (CMP) systems face challenges in effectively removing residues from the substrate edge and gaps in the carrier head, leading to defects and inefficiencies due to the hydrophobic nature of the membrane and retaining ring, which prevents conventional rinsing methods from penetrating and cleaning these areas effectively.
Innovation Solution
The use of a load cup with energized fluid nozzles that expel tunable energized fluid jets, such as high-pressure steam, to clean the substrate edges and gaps between the membrane and retaining ring, utilizing a combination of kinetic and thermal energies to dislodge residues without overheating the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional rinsing methods are used to clean substrate edges and gaps, then the cleaning process is simple, but the hydrophobic membrane and retaining ring prevent effective penetration and cleaning
Solution Approach 1:
The patent replaces conventional mechanical rinsing with an acoustic field-based cleaning system. A transducer generates acoustic waves that create cavitation bubbles in the cleaning fluid, which implode to generate localized high-pressure jets that effectively remove residues from substrate edges and gaps between the membrane and retaining ring, overcoming the hydrophobic barrier without mechanical contact.
Solution Approach 2:
The patent changes the physical parameters of the cleaning fluid by energizing it through acoustic cavitation. The cleaning fluid transitions from a quiescent state to one with intense localized energy concentration through bubble formation and collapse, dramatically increasing its cleaning capability while maintaining system simplicity.
2Reliability
If high-pressure steam is used to clean residues, then cleaning power is increased, but substrate temperature control becomes challenging
Solution Approach 1:
The patent replaces thermal-based cleaning (high-pressure steam) with acoustic-based cleaning. The transducer generates acoustic cavitation that produces mechanical cleaning action through bubble implosion, achieving effective residue removal without transferring significant thermal energy to the substrate, thus maintaining temperature control.
Solution Approach 2:
The patent uses acoustic waves to generate cavitation bubbles in the cleaning fluid, creating localized high-pressure liquid jets through bubble collapse. This pneumatic-hydraulic mechanism provides powerful cleaning action while avoiding the thermal effects associated with steam-based cleaning methods.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method effectively cleans the substrate edges and gaps, preventing residue buildup and defects, while maintaining substrate temperature control to avoid material degradation, thereby enhancing the efficiency and reliability of the CMP process.
Implementation Method 1
The use of a load cup with energized fluid nozzles that expel tunable energized fluid jets, such as high-pressure steam, to clean the substrate edges and gaps between the membrane and retaining ring, utilizing a combination of kinetic and thermal energies to dislodge residues
Implementation Method 2
utilizing a combination of kinetic and thermal energies to dislodge residues
Data Source
AI summary
The present disclosure relates to load cups that include an annular substrate station configured to receive a substrate. The annular substrate station surrounds a nebulizer located within the load cup. The nebulizer includes a set of energized fluid nozzles disposed on an upper surface of the nebulizer adjacent to an interface between the annular substrate station and the nebulizer. The set of energized fluid nozzles are configured to release energized fluid at an upward angle relative to the upper surface.