CMP Fixture Protruded Blocks Buckle Grooves
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Solution Overview
Problem
Conventional wafer fastening fixtures require frequent replacement due to adhesive failure, leading to increased manufacturing costs and potential damage to wafers, necessitating an improvement in stability and sustainability.
Innovation Solution
A chemical mechanical polishing fastening fixture with a fastening base and ring design featuring protruded blocks and grooves made of polyphenylene sulfide, where the blocks are tilted to buckle into the grooves, providing a secure and stable connection that can be enhanced with adhesives, allowing for easy assembly and manufacturing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If adhesives are used to attach the fastening ring to the fastening base, then the assembly process is simple, but the connection stability deteriorates and the fastening ring separates from the fastening base
Solution Approach 1:
The connection interface is segmented into multiple interaction points: the protruded block on the fastening base and the corresponding groove on the fastening ring. This segmentation allows the connection to be distributed across multiple localized engagement points rather than relying on a single adhesive bond, thereby improving reliability while maintaining assembly simplicity.
Solution Approach 2:
The protruded block and groove structure acts as an intermediary mechanical feature between the fastening base and fastening ring. This intermediary structure provides a physical engagement mechanism that supplements the adhesive bonding, creating a hybrid connection system that combines both chemical (adhesive) and mechanical (protrusion-groove engagement) bonding methods to enhance connection stability.
2Reliability
If the fastening base and fastening ring are frequently replaced due to connection failure, then the reliability is maintained, but the manufacturing cost increases
Solution Approach 1:
The protruded block and groove structure serves as a preventive measure against connection failure. By incorporating this mechanical engagement feature beforehand, the design cushions against the risk of adhesive failure, reducing the frequency of replacements needed and thereby lowering the overall manufacturing cost associated with frequent part replacement.
Solution Approach 2:
The improved connection structure extends the service life of the fastening base and fastening ring, allowing them to be reused for longer periods. This reduces the frequency of discarding these components and recovers the value invested in these parts, thereby reducing the overall manufacturing cost.
3Adaptability or versatility
If the fastening ring is made of high level plastics and attached to stainless steel base, then the material compatibility is improved, but the bonding reliability deteriorates due to adhesive failure
Solution Approach 1:
The connection system employs a composite approach by combining two different materials (high level plastics for the fastening ring and stainless steel for the base) with two different bonding mechanisms (adhesive bonding and mechanical engagement). The protruded block and groove structure works in conjunction with the adhesive to create a hybrid bonding system that overcomes the limitations of adhesive-only bonding between dissimilar materials, thereby improving bonding reliability while maintaining material compatibility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enhances the stability and sustainability of the fastening fixture, reducing the frequency of replacements and manufacturing costs while preventing wafer damage, by ensuring a secure and long-lasting connection between the fastening base and ring.
Implementation Method 1
the fastening base and the fastening ring are rotated counterclockwise respectively along the circumference thereof, so that the first buckling face of the protruded block is buckled with the second buckling face of the first groove
Data Source
Figure 1
Figure 2A~2B
Figure 3A~3B
AI summary
A chemical mechanical polishing fastening fixture includes a fastening base (100) and a fastening ring (200). The fastening base (100) includes an annular substrate having a first combining face (101) and a plurality of protruded blocks (110) annularly aligned on the first combining face (101). Each protruded block (110) is made of polyphenylene sulfide and includes a first buckling face (114). The first buckling face (114) is tilted from a root portion thereof toward an outer side of the protruded block (110) along a plane radially extending from the annular substrate. The fastening ring (200) has a second combing face (201) and a plurality of first grooves (210). The first grooves (210) are annularly aligned on the second combining face (201). Parts of a flange of each first groove (210) are constituted of a second buckling face (215), and the second buckling face (215) is tilted from a root portion thereof toward the second combining face (201).